Surface acoustic wave linear motor using silicon slider

2008 International Symposium on Micro-NanoMechatronics and Human Science

Sügimura

2008

A flat plane slider for a surface acoustic wave (SAW) motor has been enabled by using a chemically reduced RF power pre-load lithium niobate stator. Since a slider with no projections Slider Electrode or the flat plane slider can drive with higher preload (I T) than a slider with projections, it is expected to obtain a (v higher output force. In this paper, driving properties such as a no-load speed characteristic and output force characteristic of the flat plane slider was measured. The Rayleigh wave SAW device SAW motor with the flat plane slider achieved 18 N high (Stator transducer) output force and 0.9 m/s no-load speed. Figure 1: Schematic view of surface acoustic wave motor.

Section: Introductionmentioning

confidence: 99%

Surface Acoustic Wave Motor with Flat Plane Slider

Sakano

2008 International Symposium on Micro-NanoMechatronics and Human Science

Sügimura

2008

“…A multi contact type slider using a lot of steel balls [2] and a silicon slider [3] have been proposed. They were succeeded in gaining large output force.…”

Section: Introductionmentioning

confidence: 99%

Influence of Elastic Deformation in Surface Acoustic Wave Motor Friction Drive

Transducers ’01 Eurosensors XV

Asai

2001

SUMMARYImportance of elastic deformation control to obtain large output force is discussed. By adding pre-load to slider, stator and slider surfaces are deformed in tens nano meter. Appropriate deformation in normal direction against normal vibration displacement amplitude of surface acoustic wave existed. By moderate deformation, maximum no-load speed was 0.97 m/sec which was 88 % of the vibration velocity. The maximum output force was enlarged up to about 10 N. To produce this performance, the transducer weight and slider size were only 4.2 g and 4x4 mm 2 . The elastic deformation of the stator was almost same as the vibration displacement amplitude.

“…The stator was sized 62x13.6x1 mm 3 . The driving frequency was 9.61 MHz, which was the resonance frequency to propagate the Rayleigh wave.…”

Section: Methodsmentioning

confidence: 99%

“…RF electric power is transduced to elastic wave, and then the Rayleigh wave is excited at the interdigital transducer (IDT) with piezoelectric effect. A stator was a substrate of 128 degrees rotated Y-cut X-propagation LiNbO 3 . A slider was made of silicon and many projections were fabricated on the surface by dry etching as shown in figure 2.…”

Section: Principlementioning

confidence: 99%

See 1 more Smart Citation

Effects of ceramic thin film coating on friction surfaces for surface acoustic wave linear motor

Nakamura

IEEE Symposium on Ultrasonics, 2003

Sügimura

et al.

-The effects of ceramic thin film coating on friction surfaces for surface acoustic wave (SAW) linear motor were estimated. By using a slider coated with SiC, the maximum no-load speed of the slider was approximately 1.1 m/s, which was equivalent to the horizontal vibration velocity of the Rayleigh wave at the driving voltage of 125 V 0-p . The transient responses about four kinds of driving voltage by using the slider coated with SiC was examined, then the no-load speed of the slider was 1.5 m/s at 170 V 0-p . Furthermore, by using a slider coated with HA-DLC and a stator coated with Al 2 O 3 , the no-load speed and the output force of the slider were approximately 1.5 m/s and 3 N at 190 V 0-p . It was shown that the driving characteristics were improved by ceramic thin film coating with the proper materials such as SiC, HA-DLC and Al 2 O 3 on friction surfaces.