In this paper, squeeze film damping in a micro-beam resonator based on micro-polar theory has been investigated. The proposed model for this study consists of a clamped-clamped micro-beam bounded between two fixed layers. The gap between the microbeam and layers is filled with air. As fluid behaves differently in micro scale than macro, the micro-scale fluid field in the gap has been modeled based on micro-polar theory. Equation of motion governing transverse deflection of the micro-beam based on modified couple stress theory and also non-linear Reynolds equation of the fluid field based on micropolar theory have been nondimensionalized, linearized and solved simultaneously in order to calculate the quality factor of the resonator. The effect of micropolar parameters of air on the quality factor has been investigated. The quality factor of the of the micro-beam resonator for different values of non-dimensionalized length scale of the beam, squeeze number and also non-dimensionalized pressure has been calculated and compared to the obtained values of quality factor based on classical theory.
The efficient operation of industrial processes requires the timely and accurate diagnosis of faults in process equipment, particularly sensors, as acting on faulty measurement data can result in inefficient or dangerous operation. A common fault mode in industrial pressure sensors is mechanical damage resulting in the leakage of the internal oil (used to transmit external pressure to the sensing element) and the development of an air pocket within the device. In previous work, we have experimentally determined the faulty measurement characteristics of a commercial pressure sensor, where the sensor manufacturer has provided modified sensors with calibrated degrees of oil loss. The current paper develops a mathematical model of this tensoresistive pressure sensor, which describes and explains the impact that oil loss, and hence the presence of an air pocket, has on the static measurement response.
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