2015
DOI: 10.1590/1679-78251364
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Study of squeeze film damping in a micro-beam resonator based on micro-polar theory

Abstract: In this paper, squeeze film damping in a micro-beam resonator based on micro-polar theory has been investigated. The proposed model for this study consists of a clamped-clamped micro-beam bounded between two fixed layers. The gap between the microbeam and layers is filled with air. As fluid behaves differently in micro scale than macro, the micro-scale fluid field in the gap has been modeled based on micro-polar theory. Equation of motion governing transverse deflection of the micro-beam based on modified coup… Show more

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Cited by 13 publications
(10 citation statements)
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“…For the microrotation, the Dirichlet boundary condition (ω = 0) or the dynamic boundary condition is often used (see [19][20][21]). The last one, in the form of ω = α 0.5 rot V, 0 < α < 1, will be used in this paper.…”
Section: Flow Equationsmentioning
confidence: 99%
See 1 more Smart Citation
“…For the microrotation, the Dirichlet boundary condition (ω = 0) or the dynamic boundary condition is often used (see [19][20][21]). The last one, in the form of ω = α 0.5 rot V, 0 < α < 1, will be used in this paper.…”
Section: Flow Equationsmentioning
confidence: 99%
“…The time required for reducing the initial film thickness T m (h) from h o to h was calculated with the micropolar model of the fluid in the gap using equation (21), and compared to the corresponding reducing time …”
Section: Squeeze Film Timementioning
confidence: 99%
“…Recently, many works have been done in applying non-classical theories in modeling micro and nano structures. Ghanbari et al (2014) studied squeeze film damping in a micro-beam resonator in which the fluid media was modelled based on micropolar theory. In an other work, Ghanbari et al (2015a) by modeling the behavior of the micro fluid base on micropolar theory, presented a microsensor for measurement of a micro-scale fluid physical properties.…”
Section: Introductionmentioning
confidence: 99%
“…Today, micro-scale structures such as microbeams, microplates, microbars, etc are widely used in Micro-Electro-Mechanical-Systems (MEMS) such as micro-actuators (Padoina et al, 2015), microswitches (Joglekar, and Pawaskar, 2011), Atomic Force Microscopes (AFMs) , micro-resonators (Hassanpour et al, 2007, Ghanbari et al, 2015 and etc. Micro-resonator is a micro-scale structure supposed to vibrate at a certain frequency (usually one of its natural frequencies) and play an important role in MEMS (Hassanpour et al, 2007, Ghanbari et al, 2015.…”
Section: Introductionmentioning
confidence: 99%
“…Micro-resonator is a micro-scale structure supposed to vibrate at a certain frequency (usually one of its natural frequencies) and play an important role in MEMS (Hassanpour et al, 2007, Ghanbari et al, 2015. Hence, modeling the micro-resonators accurately and investigating their vibration behavior seem to be crucial.…”
Section: Introductionmentioning
confidence: 99%