Geraint OwenHewlett Packard Laboratory, Fremont, CA 94538 A two-dimensional self-calibration experiment obtains Cartesian traceability for high-precision tools. The cdibration procedure incorporates group theory principks to solve our indust,y's two-dimensional calibration problem.With group theory, a Cartesian system is obtainable through mathematics; thus, eliminating the need for any certifIed standards. The calibration algorithm was developed by Jun Ye at Stanford University and funded by the Semiconductor Research Corporation (SRC) with collaboration from Hewlett Packard (HP) and IBM1. The data was collected from Leica's LMS2000 and LMS2O2O systems.
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