A variable (0.2 to 5 MHz) repetition rate femtosecond laser was applied to delineate the role of thermal diffusion and heat accumulation effects in forming low-loss optical waveguides in borosilicate glass across a broad range of laser exposure conditions. For the first time, a smooth transition from diffusion-only transport at 200 kHz repetition rate to strong heat accumulation effects at 0.5 to 2 MHz was observed and shown to drive significant variations in waveguide morphology, with rapidly increasing waveguide diameter that accurately followed a simple thermal diffusion model over all exposure variables tested. Amongst these strong thermal trends, a common exposure window of 200 mW average power and approximately 15-mm/s scan speed was discovered across the range of 200 kHz to 2 MHz repetition rates for minimizing insertion loss despite a 10-fold drop in laser pulse energy. Waveguide morphology and thermal modeling indicate that strong thermal diffusion effects at 200 kHz give way to a weak heat accumulation effect at approximately 1 microJ pulse energy for generating low loss waveguides, while stronger heat accumulation effects above 1-MHz repetition rate offered overall superior guiding. A comprehensive characterization of waveguide properties is presented for laser writing in the thermal diffusion and heat accumulation regimes. The waveguides are shown to be thermally stable up to 800 degrees C and can be written in a convenient 520 microm depth range with low spherical aberration.

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We present a novel multi-level diffractive optical element for diffractive optic near-field lithography based fabrication of large-area diamond-like photonic crystal structure in a single laser exposure step. A multi-level single-surface phase element was laser fabricated on a thin polymer film by two-photon polymerization. A quarter-period phase shift was designed into the phase elements to generate a 3D periodic intensity distribution of double basis diamond-like structure. Finite difference time domain calculation of near-field diffraction patterns and associated isointensity surfaces are corroborated by definitive demonstration of a diamond-like woodpile structure formed inside thick photoresist. A large number of layers provided a strong stopband in the telecom band that matched predictions of numerical band calculation. SEM and spectral observations indicate good structural uniformity over large exposure area that promises 3D photonic crystal devices with high optical quality for a wide range of motif shapes and symmetries. Optical sensing is demonstrated by spectral shifts of the Gamma-Zeta stopband under liquid emersion.

For the first time femtosecond-laser writing has inscribed low-loss optical waveguides in Schott BK7 glass, a commercially important type of borosilicate widely used in optical applications. The use of a variable repetition rate laser enabled the identification of a narrow processing window at 1 MHz repetition rate with optimal waveguides exhibiting propagation losses of 0.3 dB/cm and efficient mode matching to standard optical fibers at a 1550 nm wavelength. The waveguides were characterized by complementary phase contrast and optical transmission microscopy, identifying a micrometer-sized guiding region within a larger complex structure of both positive and negative refractive index variations.

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Diffractive optical elements serve an important function in many dynamic and static optical systems. Multilayered diffractive elements offer powerful opportunity to harness both phase and amplitude modulation for benefits in diffraction efficiency and beam shaping. However, multilayered combinations have been difficult to fabricate and provide only weak diffraction for phase gratings with low refractive index contrast. Femtosecond laser writing of finely-pitched multilayer volume gratings was optimized in bulk fused silica. We identify and quantify an optimum layer-to-layer separation according to Talbot self-imaging planes and present systematic experimental validation of this new approach to enhance otherwise weakly diffracting volume gratings.

Volume diffractive optical elements promise widespread application in laser beam shaping, imaging and optical data storage by structuring refractive index modulation in the third axial dimension. Femtosecond laser direct writing has been exploited inside fused silica to assemble multiple 1D grating layers on Talbot planes and overcome the inherent weak diffraction efficiency otherwise found in low-contrast volume gratings. Here, we extend laser structuring from linear (1D) to orthogonally crossed (2D) gratings with the aim to write 3D photonic crystal templates in photoresist by 3D interference lithography. The formation of crossed grating structures present challenges in balancing the efficiency of diffraction orders owing to blazing and index overwriting effects requiring compensation by tuning the grating design and laser power exposure. In this way, six-layer grating designs have been fabricated and applied to exposure of thick photoresist, enabling the formation of 3D photonic crystal templates with bicontinuous structure. A systematic offsetting of orthogonal grating layers to establish phase offsets over 0 to π/2 range presents a precise means for controlling the photonic crystal structure symmetry between body centered tetragonal (BCT) and woodpilelike tetragonal (wTTR).

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