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Starting from graphene, 2D layered materials family has been recently set up more than 100 different materials with variety of different class of materials such as semiconductors, metals, semimetals, superconductors. Among these materials, 2D semiconductors have found especial importance in the state of the art device applications compared to that of the current conventional devices such as (which material based for example Si based) field effect transistors (FETs) and photodetectors during the last two decades. This high potential in solid state devices is mostly revealed by the transition metal dichalcogenides (TMDCs) semiconductor materials such as MoS 2 , WS 2 , MoSe 2 and WSe 2 . Therefore, many different methods and approaches have been developed to grow or obtain so far in order to make use them in solid state devices, which is a great challenge in large area applications. Although there are intensively studied methods such as chemical vapor deposition (CVD), mechanical exfoliation, atomic layer deposition, it is sputtering getting attention day by day due to the simplicity of the growth method together with its reliability, large area growth possibility and repeatability. In this review article, we provide benefits and disadvantages of all the growth methods when growing TMDC materials, then focusing on the sputtering TMDC growth strategies performed. In addition, TMDCs for the FETs and photodetector devices grown by RFMS have been surveyed.

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Taking into account the novel layered structure and unusual electronic properties of MoS2 and WS2 on the side the lack of dangling bonds between these two components and donor-acceptor linkage effects, growth of the MoS2/WS2 vertical heterojunction film on the amorphous SiO2/Si substrate have created high demand. In this study, we reported the continuous, scalable, and vertical MoS2/WS2 heterostructure film by using a sputtering without a transfer step. The WS2 film was continuously grown on MoS2 and eventually led to the formation of the MoS2/WS2 vertical heterojunction film. Dozens of FETs fabricated on MoS2/WS2 continuous heterojunction film were created on the same substrate in a single lithographic fabrication step, allowing them to be commercialized and not only used in research applications. RAMAN spectra proved the formation of the MoS2/WS2 heterostructure film. In XPS measurements, it was shown that a separate MoS2 and WS2 layer was grown instead of the alloy structure. The polarity behavior of the MoS2/WS2 heterostructure FET was found to be modulated with different drain voltages as p-type to ambipolar and finally n-type conductivity because of the transition of band structure and Schottky barrier heights at different drain voltages. Electron mobility (7.2 cm2/V.s) and on/off ratio (104-105) exhibited by the MoS2/WS2 heterostructure FETs displayed a more improved electrical performance than that of individual WS2, MoS2 devices. It was observed that the mobility value of MoS2/WS2 FET was approximately 514 times greater than WS2 FET and 800 times greater than MoS2 FET. Additionally, the MoS2/WS2 FET on/off ratio was larger than 2 order MoS2 FET and 1 order WS2 FET. The film of continuous vertical heterojunctions as in the MoS2/WS2 currents in the study would be a promising candidate for nanoelectronics fields. This work demonstrated the progress towards realizing carrier-type controlled high-performance MoS2/WS2 heterojunction-based FETs for future logic devices.

This paper mainly focused on one of the recent attractive electronic devices which is the ambipolar field-effect transistor. Ambipolarity has become important for many applications in recent years. Many factors that cause ambipolarity have been reported in the literature. However, the causes of ambipolarity have not been fully investigated so far. In this study, the degree of ambipolarity was determined as a function of the channel thickness for the WS2 FET device. For the WS2 FET device, the ambipolarity starts from a few layers of channel thickness, and then as the thickness increases, the ambipolarity begins to decrease again. It has been observed that as the thickness increases, the degree of ambipolarity approaches zero. The fact that the degree of ambipolarity approaches zero indicates that the WS2 channel exhibits natural n-type behavior and the ambipolarity effect disappears.

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