Direct laser writing (DLW) enables arbitrary three-dimensional nanofabrication. However, the diffraction limit poses a major obstacle for realizing nanometer-scale features. Furthermore, it is challenging to improve the fabrication efficiency using the currently prevalent single-focal-spot systems, which cannot perform high-throughput lithography. To overcome these challenges, a parallel peripheral-photoinhibition lithography system with a sub-40-nm two-dimensional feature size and a sub-20-nm suspended line width was developed in our study, based on two-photon polymerization DLW. The lithography efficiency of the developed system is twice that of conventional systems for both uniform and complex structures. The proposed system facilitates the realization of portable DLW with a higher resolution and throughput.
We propose a new method for the development of multi-beam systems for the spatial alignment and stability of beams based on the error separation technique. This method avoids alignment errors caused by coupling effect of piezoelectric devices, inaccurate correction calculations, and detection mode of the angular deviation. According to the results by external detectors, the error value of spatial alignment and the root mean square (RMS) of deviations under control during 1 h can be equivalent to approximately 0.87 and 1.06 nm at the sample plane under an oil immersion lens (focal length f = 2 mm). The RMS of deviations is less than one-third of those currently reported for multi-beam systems; therefore, higher alignment and stability accuracy can be achieved with our proposed method.
The laser beam stabilization system facilitates high-precision correction of the laser beam via the control of the beam position and angle, providing long-term stability. It plays an important role in micro/ nano-laser direct writing and super-resolution imaging. In this paper, a miniaturized laser stabilization sys• tem with error separation technology, which eliminates the coupling error caused by traditional dual-mirror controlling and improves the performance of laser beam stabilization control, is proposed. Comparative ex•
Three-dimensional (3D) laser nanoprinting with high resolution and low cost is highly desirable for fabricating arbitrary 3D structures with fine feature size. In this work, we use a 405-nm integrated fiber-coupled continuous wave (cw) laser diode to establish an easy-to-build 3D nanoprinting system based on two-step absorption. Two-dimensional (2D) gratings with a sub-150-nm period and 3D woodpile nanostructures with a lateral period of 350 nm have been printed at a low speed. At a faster scan velocity of 1000 µm/s, 2D gratings with sub-200-nm resolution and sub-50-nm linewidth can still be fabricated with laser power less than 1 mW. The two-step absorption of the used benzil initiator enables us to use a second cw laser with 532-nm wavelength to enhance the polymerization with sub-100-nm feature size when starting with insufficient 405-nm laser power, which possess the potential to find applications in high-speed high-resolution parallel-writing and in situ manipulation.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.