High-accuracy laser spatial alignment and stabilization system with error separation technology

Abstract

The laser beam stabilization system facilitates high-precision correction of the laser beam via the control of the beam position and angle， providing long-term stability. It plays an important role in micro/ nano-laser direct writing and super-resolution imaging. In this paper， a miniaturized laser stabilization sys• tem with error separation technology， which eliminates the coupling error caused by traditional dual-mirror controlling and improves the performance of laser beam stabilization control， is proposed. Comparative ex•