Intermetallic compounds have been proposed as potential interconnect materials for advanced semiconductor devices. This study reports the interdiffusion reliability and resistivity scaling of three low-resistivity intermetallic compounds (Cu2Mg, CuAl2, and NiAl) formed on thermally grown SiO2. Experimental observations and thermodynamic calculations indicated good interdiffusion reliability with CuAl2 and NiAl but not with Cu2Mg. This was due to slow reaction between Al and SiO2 in conjunction with strong chemical bonds of Cu–Al and Ni–Al. As for resistivity scaling, all three intermetallic compounds showed better resistivity scalability than Cu. Resistivity of the thin films was measured and characteristic parameters were obtained by curve fitting using a classical scattering model. First-principles calculations were carried out to determine the electron mean free path and bulk resistivity in order to explain the resistivity scaling. The results showed the importance of having optimum microstructure features, i.e., low-defect-density surface, interface, and grain boundaries in addition to optimum material properties, i.e., a short mean free path and low bulk resistivity. CuAl2 and NiAl appeared to satisfy the interdiffusion and resistivity conditions and be promising candidates to replace Cu interconnections for future devices.
We explored suitable amorphous alloys for a diffusion barrier interlayer between conductor and insulator materials for advanced semiconductor devices. A thermodynamic simulation method was employed, for the first time in the field of large-scale integrated circuit interconnections, to enable quantitative evaluation of the thermal stability and diffusion barrier property of the interlayer, which led us to narrow down a vast number of binary alloy candidates to a few cobalt-based alloys. The selected alloys were experimentally examined for adhesion strength with an oxide insulator, resistivity variation with composition, annealing temperature and film thickness, thermal stability of composition distribution and structure, and diffusion barrier property under high electric field at elevated temperature. Combining the simulation and experimental results, we proposed an amorphous Co-15 at. %Zr alloy as the most suitable choice and discussed its possibility and challenges.
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