Electrical resistivity of AlN ceramics was examined with various amounts of Y2O3 within 0 to 4.8 mass%. The electrical resistivity at room temperature varied from 10 16 to 10 10 Ω·cm with different Y2O3 amounts and at sintering temperatures. In the typical samples sintered at 1900°C, a smaller amount of Y2O3 addition with 0.1 to 0.5 mass% gives the lowest electrical resistivity of 10 10 Ω·cm, whereas the higher amount of Y2O3 maintains high resistivity of more than 10 13 Ω·cm. The results derived from different analytical techniques such as impedance analysis, cathodoluminescence spectrum and microstructural analysis explain the importance of the oxygen concentration in the AlN grain for the electrical resistivity of AlN ceramics.