Ru films were fabricated by chemical vapor deposition using Ru(C 5 H 5 ) 2 and O 2 . The deposition of Ru film was controlled by the surface reaction kinetics as the rate limiting step with activation energy of 2.48 eV below 250 • C and by the mass transport process above 250 • C. Ru films had a polycrystalline structure and showed low resistivity of about 12 µ cm. Ru films deposited at 230 • C showed excellent step coverage. We applied Ru films prepared by chemical vapor deposition to the bottom electrode of a Ba 0.25 Sr 0.75 TiO 3 capacitor and obtained good electrical characteristics.

The SrTiO3 ultrathin film capacitors were realized on Nb-doped single-crystal SrTiO3 substrates by chemical vapor deposition. The leakage current density of 10.4 nm thick SrTiO3 thin-film capacitor was below 1×10−8 A/cm2 in the applied voltage range of −1.8 to +0.45 V, and its SiO2 equivalent thickness was 0.48 nm. The relative dielectric constant was over 160 for SrTiO3 thickness above 20 nm, but it decreased for SrTiO3 thickness below 20 nm. Dependence of leakage current on SrTiO3 film thickness was slight. These results could be explained by the existence of applied electric field concentration near the SrTiO3/electrode interface.

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Low femperature (600°C) (Ba, Sr)Ti03 (BST) capacitor process integration (LTB) based on SrRu03 (SRO) electrode is proposed to achieve gigabit scaled and embedded DRAMs. BST crystallizing temperature is successfully reduced by SRO, which has the same perovskite structure as BST film. Chemical Mechanical polishing (CMP) and O3 water etching are developed for a storage node (SN) electrode and a plate (PL) electrode patterning. A new low temperature post anneal method is also proposed in order to reduce oxygen vacancies at a top electrode-BST interface.

Positive pressure infusion of Y 2 O 3 :Eu 3+ particles 8-12 nm in size was carried out in 75 cm 3 samples of 0.6% agarose gels that have internal mass transport properties similar to those of in vivo mammalian brain tissue. The purpose of the study was to investigate the nature of the porous-like structure of the gels at distance scales of the order of ≈10 nm. Fluorescence of the particles under UV excitation was used to observe their time-dependent distribution pattern, with the result that the convection-enhanced flow provided by the infusion process caused the particles to permeate the gel's interstitial structure, thus revealing a porosity scale size commensurate with that of the particle size.