A volume-averaged global model is developed to investigate surface-wave discharges inside either cylindrical or coaxial structures. The neutral and ion wall flux is self-consistently estimated based on a simplified analytical description both for electropositive and electronegative plasmas. The simulation results are compared with experimental data from various discharge setups of either argon or oxygen, measured or obtained from literature, for a continuous and a pulse-modulated power input. A good agreement is observed between the simulations and the measurements. The calculations show that the wall flux often substantially contributes to the net loss rates of the individual species.

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In this work, a reactive argon−nitrogen Ar N 10 1 2 [ ( )] / dc magnetron plasma for sputtering of a chromium (Cr) target is characterized with high spatial resolution by optical emission spectroscopy (OES) using molecular nitrogen emission bands at 0.5 Pa and 100 W. Beside the global gas temperature T g , the electron temperature T e , electron density n e , and the steady-state Cr density n Cr are also determined spatially resolved using a movable OES setup inside the chamber and Abel inversion. n e and T e are found to be consistent with the values measured by a Langmuir probe (LP) within the non-magnetized region along the magnetron axis in a pure Ar plasma for the same process parameters. Finally, a nitrogen content c N of 4% in the target surface is found for the reactive plasma by matching the mean steady-state chromium density n Cr measured by OES and calculated from TRIDYN simulations.

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