2017
DOI: 10.1088/1361-6463/aa7093
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A global model of cylindrical and coaxial surface-wave discharges

Abstract: A volume-averaged global model is developed to investigate surface-wave discharges inside either cylindrical or coaxial structures. The neutral and ion wall flux is self-consistently estimated based on a simplified analytical description both for electropositive and electronegative plasmas. The simulation results are compared with experimental data from various discharge setups of either argon or oxygen, measured or obtained from literature, for a continuous and a pulse-modulated power input. A good agreement … Show more

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Cited by 14 publications
(27 citation statements)
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References 100 publications
(158 reference statements)
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“…Both the zero-dimensional volume-averaged formalism [10,11] and the pseudo-one-dimensional plug-flow formalism [12,14,16] are implemented. The balance equations are averaged over the whole plasma domain in the zero-dimensional formalism, and steady or transient volume-averaged plasma quantities are calculated [54,55]. In the pseudoone-dimensional formalism, the equations are averaged over a much smaller plug-volume, that is infinitesimally small along the unidirectional laminar net mass flow field.…”
Section: Modelmentioning
confidence: 99%
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“…Both the zero-dimensional volume-averaged formalism [10,11] and the pseudo-one-dimensional plug-flow formalism [12,14,16] are implemented. The balance equations are averaged over the whole plasma domain in the zero-dimensional formalism, and steady or transient volume-averaged plasma quantities are calculated [54,55]. In the pseudoone-dimensional formalism, the equations are averaged over a much smaller plug-volume, that is infinitesimally small along the unidirectional laminar net mass flow field.…”
Section: Modelmentioning
confidence: 99%
“…This term is also neglected in the pseudo-one-dimensional formalism since the convective mass flow mechanism prevails the flux vector [14]. The wall loss of an ion i at the surfaces parallel to the mass flow field is defined as [55,64,65]…”
Section: Modelmentioning
confidence: 99%
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“…The electron density follows from the particle balance as well as quasi neutrality and the electron temperature from the energy balance. The authors refer to earlier studies [15][16][17] for a validation and a verification of the global model of microwave-induced discharges in the considered pressure regime.…”
Section: Plasma Modelmentioning
confidence: 99%
“…The authors refer to earlier studies [15][16][17] for a validation and a verification of the global model of microwave-induced discharges in the considered pressure regime.…”
Section: B Plasma Modelmentioning
confidence: 99%