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Bio-inspired surfaces with superamphiphobic properties are well known as effective candidates for antifouling technology. However, the limitation of large-area mastering, patterning and pattern collapsing upon physical contact are the bottleneck for practical utilization in marine and medical applications. In this study, a roll-to-plate nanoimprint lithography (R2P NIL) process using Morphotonics’ automated Portis NIL600 tool was used to replicate high aspect ratio (5.0) micro-structures via reusable intermediate flexible stamps that were fabricated from silicon master molds. Two types of Morphotonics’ in-house UV-curable resins were used to replicate a micro-pillar (PIL) and circular rings with eight stripe supporters (C-RESS) micro-structure onto polycarbonate (PC) and polyethylene terephthalate (PET) foil substrates. The pattern quality and surface wettability was compared to a conventional polydimethylsiloxane (PDMS) soft lithography process. It was found that the heights of the R2P NIL replicated PIL and C-RESS patterns deviated less than 6% and 5% from the pattern design, respectively. Moreover, the surface wettability of the imprinted PIL and C-RESS patterns was found to be superhydro- and oleophobic and hydro- and oleophobic, respectively, with good robustness for the C-RESS micro-structure. Therefore, the R2P NIL process is expected to be a promising method to fabricate robust C-RESS micro-structures for large-scale anti-biofouling application.
Roll-to-plate nanoimprinting with flexible stamps is a fabrication method to pattern large-area substrates with micro- and nanotextures. The imprint consists of the preferred texture on top of a residual layer, of which the thickness and uniformity is critical for many applications. In this work, a numerical model is developed to predict the residual layer thickness (RLT) as a function of the imprint parameters. The model is based on elastohydrodynamic lubrication (EHL) theory, which combines lubrication theory for the pressure build-up in the resin film, with linear elasticity theory for the elastic deformation of the roller material. The model is extended with inextensible cylindrical shell theory to capture the effect of the flexible stamp, which is treated as a tensioned web. The results show that an increase in the tension of the web increases the effective stiffness of the roller, resulting in a reduction in the RLT. The numerical results are validated with layer height measurements from flat layer imprints. It is shown that the simulated minimum layer height corresponds very well with the experimental results for a wide range of resin viscosities, imprint velocities, and imprint loads.
Today, the prevailing AR‐glasses displays are using waveguides. The light in‐ & outcoupling structures that these glasses contain can be made by UV nanoimprint lithography. Nanoimprint lithography tools have typical cycle times of around 40 imprints per hour, roughly resulting in 8M eyepieces per year made on 300mm wafers. To serve the projected mass market adoption, hundreds of imprint tools will be needed. An important question is how the eyepieces can be made more efficiently and cost‐effectively. The Morphotonics' Roll‐to‐Plate imprint technology enables high volume production, having the opportunity for large‐area imprinting, manufacturing multiple products in a single imprint step.
This work presents the development of a numerical model for the elastohydrodynamic lubrication of roll-to-plate nanoimprinting with flexible stamps. Roll-to-plate nanoimprinting is a manufacturing method to replicate micro- and nanotextures on large-area substrates with ultraviolet-curable resins. The roller is equipped with a relatively soft elastomeric layer, which elastically deforms during the imprint process. The elastic deformation is described by linear elasticity theory. It is coupled to the pressure build-up in the liquid resin film, which is described by lubrication theory. The flexible stamp, which is treated as a tensioned web, is pre-tensioned around the roller. The elastic deformation of the tensioned web is described by the large-deflection bending of thin plates equations, considering its non-negligible bending stiffness. A Fischer–Burmeister complementarity condition captures the contact mechanics between the tensioned web and the roller. The governing equations combine in a coupled elastohydrodynamic lubrication model, which is fully described by a set of non-dimensional numbers. These are used in a parameter study to investigate the effect on the pressure and film height distributions. It is shown that the bending stiffness of the tensioned web results in an additional hydrodynamic pressure peak and corresponding minimum in the film height, near the inlet of the roller contact. An increase of the bending stiffness corresponds to a decrease in film height. The numerical results are compared with benchmarks from literature and experimentally validated with layer height measurements from flat layer imprints. Good agreement is found between the numerical and experimental results.
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