2021
DOI: 10.3390/nano11020339
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Fabrication of High Aspect Ratio Micro-Structures with Superhydrophobic and Oleophobic Properties by Using Large-Area Roll-to-Plate Nanoimprint Lithography

Abstract: Bio-inspired surfaces with superamphiphobic properties are well known as effective candidates for antifouling technology. However, the limitation of large-area mastering, patterning and pattern collapsing upon physical contact are the bottleneck for practical utilization in marine and medical applications. In this study, a roll-to-plate nanoimprint lithography (R2P NIL) process using Morphotonics’ automated Portis NIL600 tool was used to replicate high aspect ratio (5.0) micro-structures via reusable intermedi… Show more

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Cited by 24 publications
(23 citation statements)
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“… 53 , 54 Such processes have been demonstrated in industry for fabricating functional nanopatterns such as antireflection, superhydrophobic, and nanophotonic surfaces. 55 − 57 There are likely to be additional challenges with coatings. The UASC process could be integrated into a production line by using multiple ultrasonic spraying nozzles.…”
mentioning
confidence: 99%
“… 53 , 54 Such processes have been demonstrated in industry for fabricating functional nanopatterns such as antireflection, superhydrophobic, and nanophotonic surfaces. 55 − 57 There are likely to be additional challenges with coatings. The UASC process could be integrated into a production line by using multiple ultrasonic spraying nozzles.…”
mentioning
confidence: 99%
“…One of the exciting things about nanoimprinting is the big versatility of the process and the broad range of applications it can be used for. This special issue includes 10 articles [ 1 , 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 , 10 ] which represent a small glimpse of the challenges and possibilities of this technology.…”
mentioning
confidence: 99%
“…Six contributions deal with nanoimprint processes aiming at specific applications [ 2 , 4 , 6 , 8 , 9 , 10 ], while the other four papers focus on more general aspects of nanoimprint processes [ 3 , 5 , 7 ] or present novel materials [ 1 , 3 ]. Several different types of nanoimprint processes are used: plate-to-plate [ 1 , 2 , 3 , 5 , 7 , 10 ], roll-to-plate [ 4 , 6 ], and roll-to-roll [ 8 ]. Plate-to-plate NIL here also includes the use of soft and flexible stamps.…”
mentioning
confidence: 99%
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