The ability to rapidly perform root cause analysis (RCA) on yield limiting defects is critical to a fab’s ramp. Here we present two methodologies for RCA using specially designed high density test structure arrays and a FIB/SEM DualBeam. These methodologies have been proven to identify the root cause of both hard and soft electrical failures. Correlation between electrical test results and the yield-impacting defects are presented.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.