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Transparent films of copper yttrium oxide doped with 2% calcium have been prepared by rf magnetron sputtering. The films show a conductivity of 8 Scm -1 on intercalation of oxygen at high pressure, which reduced the transparency in the visible region. The Ca-doped CuYO 2 films before oxygen intercalation show an average transmission of about 60% which reduces to about 45% upon oxygen intercalation. The temperature dependence of the conductivity indicates semiconductor behaviour with low activation energy of 0⋅59 eV at room temperature. The positive sign of Seebeck coefficient (+274 μVK -1 ) confirms the p-type conductivity of the films. The optical bandgap of CuYO 2 was found to be 3⋅15 eV.

The radio frequency plasma generated during the sputtering of Indium Tin Oxide target using Argon was analyzed by Langmuir probe and optical-emission spectroscopy. The basic plasma parameters such as electron temperature and ion density were evaluated. These studies were carried out by varying the RF power from 20 to 50 W. A linear increase in ion density and an exponential decrease in electron temperature with rf power were observed. The measured plasma parameters were then correlated with the properties of ITO thin films deposited under similar plasma conditions.

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