Influence of target to substrate spacing on the properties of ITO thin films

Antony, Aldrin; Nisha, M. S.; Manoj, Reema; Jayaraj, M. K.

doi:10.1016/j.apsusc.2003.10.017

Cited by 57 publications

(34 citation statements)

References 14 publications

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“…[1][2][3]. It is known that Indium tin oxide (ITO) material is a degenerate n-type semiconductor and is the most suitable oxide thin film for the above mentioned as well as many other applications.…”

Section: Introductionmentioning

confidence: 99%

Deposition and optoelectronic properties of ITO (In2O3:Sn) thin films by Jet nebulizer spray (JNS) pyrolysis technique

Sethupathi¹,

Thirunavukkarasu²,

Vidhya³

et al. 2011

J Mater Sci: Mater Electron

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Nanocrystalline ITO thin films were deposited on glass substrates by a new spray pyrolysis route, Jet nebulizer spray (JNS) pyrolysis technique, for the first time at different substrate temperatures varying from 350 to 450°C using a precursor containing indium and tin solution with 90:10 at% concentration. The structural, optical and electrical properties have been investigated as a function of temperature. X-ray diffraction analysis showed that the deposited films were well crystallized and polycrystalline with cubic structure having (222) preferred orientation. The optical band gap values calculated from the transmittance spectra of all the ITO films showed a blue shift of the absorbance edge from 3.60 to 3.76 eV revealing the presence of nanocrystalline particles. AFM analysis showed uniform surface morphology with very low surface roughness values. XPS results showed the formation of ITO films with In 3? and Sn 4? states. TEM results showed the nanocrystalline nature with grain size about 12-15 nm and SAED pattern confirmed cubic structure of the ITO films. The electrical parameters like the resistivity, mobility and carrier concentration are found as 1.82 9 10 -3 X cm, 8.94 cm 2 /Vs and 4.72 9 10 20 cm -3 , respectively for ITO film deposited at 400°C. These results show that the ITO films, prepared using the new JNS pyrolysis technique, have the device quality optoelectronic properties when deposited under the proposed conditions at 400°C.

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Section: Introductionmentioning

confidence: 99%

Deposition and optoelectronic properties of ITO (In2O3:Sn) thin films by Jet nebulizer spray (JNS) pyrolysis technique

Sethupathi¹,

Thirunavukkarasu²,

Vidhya³

et al. 2011

J Mater Sci: Mater Electron

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“…In case that the size of micronized droplet is small and there are a large amount of droplets, the mutual cohesion between droplets becomes increasingly severe, and the speed of cohesion also becomes faster. In equation (2), 7) assuming that Brown movement is the cause of the collisions between droplets, and that β is a constant, the possibility of cohesion between the preliminarily micronized droplets increases considerably along with the reduction of droplet size.…”

Section: )mentioning

confidence: 99%

“…Generally, a transparent electromagnetic wave shielding material is required to have the shielding capacity above 20db, and the optical transmissivity above 60% within the visible spectrum (380~780 nm). [7][8][9] ITO exhibits an optical transmissivity above 80% and excellent electrical conductivity. Consequently, research activities related to the manufacture of ITO film and its property enhancement are being conducted actively.…”

Section: Introductionmentioning

confidence: 99%

“…Consequently, research activities related to the manufacture of ITO film and its property enhancement are being conducted actively. [7][8][9] However, there hasn't been too much research effort regarding the mass production of indium oxide powder 10) and tin oxide powder with average particle size below 50 nm and uniform particle size distribution. In particular, there has been hardly any research activity related to the manufacture of nano-size tin oxide powder due to the engineering difficulties.…”

Section: Introductionmentioning

confidence: 99%

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Preparation of Nano-Sized Tin Oxide Powder from Tin Chloride Solution by Spray Pyrolysis Process

Yu¹,

Kim²

2011

Korean. J. Mater. Res.

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In this study, by using tin chloride solution as a raw material, a nano-sized tin oxide powder with an average particle size below 50 nm is generated by a spray pyrolysis process. The properties of the generated tin oxide powder depending on the inflow speed of the raw material solution are examined. When the inflow speed of the raw material solution is 2 ml/min, the majority of generated particles appear in the shape of independent polygons with average size above 80-100 nm, while droplet-shaped particles show an average size of approximately 30 nm. When the inflow speed is increased to 5 ml/min, the ratio of independent particles decreases, and the average particle size is approximately 80-100 nm. When the inflow speed is increased to 20 ml/min, the ratio of droplet-shaped particles increases, whereas the ratio of independent particles with average size of 80-100 nm decreases. When the inflow speed is increased to 100 ml/min, the average size of the generated particles is around 30-40 nm, and most of them maintain a droplet shape. With a rise of inflow speed from 2 ml/min to 5 ml/min, a slight increase of the XRD peak intensity and a minor decrease of specific surface area are observed. When the inflow speed is increased to 20 ml/min, the XRD peak intensity falls dramatically, although a significant rise of specific surface area is observed. When the inflow speed is increased to 100 ml/min, the XRD peak intensity further decreases, while the specific surface area increases.Key words tin chloride solution, spray pyrolysis process, nano-sized tin oxide powder, average particle size, inflow speed of raw material solution.

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“…Consequently, research activities related to the manufacture of ITO film and its property enhancement are being conducted actively. [1][2][3][4][5] However, there hasn't been too much research effort regarding the effective recycling of waste ITO target generated from the manufacturing process of ITO film. Ideally, ITO target is required to have excellent sinterability, but practically ITO target is an unsinterable material.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Nano-Sized ITO Powder from Waste ITO Target by Spray Pyrolysis Process

Kang

Jung

et al. 2007

Mater. Trans.

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In this study, a nano-sized ITO powder with the average particle size below 50 nm by using waste ITO target is generated by spray pyrolysis proces. This study also examines the influences of reaction parameters such as reaction temperature, concentration and inflow speed of raw material solution on the properties of the generated ITO powder.As the reaction temperature increases from 800 C to 1100 C, the average particle size of the generated ITO powder increases from 40 nm to 100 nm, the microstructure gradually becomes compact, the particle size distribution becomes increasingly irregular, the XRD peak intensity gradually increases, and the specific surface area decreases.When the concentration of the solution is at 50 g/L, the average particle size of the ITO powder is below 30 nm, and the particle size distribution appears comparatively uniform. As the concentration reaches 400 g/L, which is close to the saturated concentration, the particle size distribution appears extremely irregular, and the particles with the size ranging from 20 nm to 100 nm coexist. Along with the rise of concentration, the XRD peak intensity gradually increases, yet the specific surface area decreases.As the inflow speed of the raw material solution increases from 2 mL/min to 100 mL/min, the average particle size of the ITO powder increases from 30 nm to 90 nm, yet the particle size distribution becomes irregular, and individual particles appear in the distinct shape of polygon. Along with the rise of inflow speed, the XRD peak intensity gradually increases, and the specific surface area decreases.

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Influence of target to substrate spacing on the properties of ITO thin films

Cited by 57 publications

References 14 publications

Deposition and optoelectronic properties of ITO (In2O3:Sn) thin films by Jet nebulizer spray (JNS) pyrolysis technique

Deposition and optoelectronic properties of ITO (In2O3:Sn) thin films by Jet nebulizer spray (JNS) pyrolysis technique

Preparation of Nano-Sized Tin Oxide Powder from Tin Chloride Solution by Spray Pyrolysis Process

Fabrication of Nano-Sized ITO Powder from Waste ITO Target by Spray Pyrolysis Process

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