Problems in the application of a null lens for surface shape measurements of aspherical mirrors are discussed using the example of manufacturing an aspherical concave mirror for the beyond extreme ultraviolet nanolithographer. A method for allowing measurement of the surface shape of a sample under study and the aberration of a null lens simultaneously, and for evaluating measurement accuracy, is described. Using this method, we made a mirror with an aspheric surface of the 6th order (i.e., the maximum deviation from the best-fit sphere is 6.6 μm) with the parameters of the deviations from the designed surface PV=5.3 nm and RMS=0.8 nm. An approximation of the surface shape was carried out using Zernike polynomials {Z(n)(m)(r,φ),m+n≤36}. The physical limitations of this technique are analyzed. It is shown that for aspheric measurements to an Angstrom accuracy, one needs to have a null lens with errors of less than 1 nm. For accurate measurements, it is necessary to establish compliance with the coordinates on the sample and on the interferogram.
Circular Zernike polynomials are often used for approximation and analysis of optical surfaces. In this paper, we analyse their lateral resolving capacity, illustrating the effects of a lack of approximation by a finite set of polynomials and answering the following questions: What is the minimum number of polynomials that is necessary to describe a local deformation of a certain size? What is the relationship between the number of approximating polynomials and the spatial spectrum of the approximation? What is the connection between the mean-square error of approximation and the number of polynomials? The main results of this work are the formulas for calculating the error of fitting the relief and the connection between the width of the spatial spectrum and the order of approximation.
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