We report on the fabrication of a grid polarizer for the visible spectral region, based on metallic grids with periods below 100 nm. Theoretical calculations of the degree of polarization predict useful values for the visible region, if the period is in the range of lOOnm. The properties of the polarizer are shown to be strongly dependent on the optical constants of the metal and the substrate. For the fabrication of the grids, direct e-beam writing in combination with a dry etching process has been used. Metallic grids with 50 nm lines and a period of 100 nm were fabricated on a glass substrate. Measurements of the degree of polarization were made at a wavelength of 670 nm. The results are compared to theoretical calculations made in the framework of a rigorous diffraction theory.

No abstract

Experimental evaluation method of point spread functions used for proximity effects correction in electron beam lithography J. Vac. Sci. Technol. B 29, 06F311 (2011); 10.1116/1.3656343 Adaptive neural network algorithms for computing proximity effect corrections J. Vac. Sci. Technol. B 9, 3054 (1991); 10.1116/1.585368Proximity effect correction using a dose compensation curve

No abstract

No abstract