Nanofabrication Technologies and Device Integration 1994
DOI: 10.1117/12.180973
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Grid polarizer for the visible spectral region

Abstract: We report on the fabrication of a grid polarizer for the visible spectral region, based on metallic grids with periods below 100 nm. Theoretical calculations of the degree of polarization predict useful values for the visible region, if the period is in the range of lOOnm. The properties of the polarizer are shown to be strongly dependent on the optical constants of the metal and the substrate. For the fabrication of the grids, direct e-beam writing in combination with a dry etching process has been used. Meta… Show more

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Cited by 20 publications
(8 citation statements)
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“…For this purpose we used metallic subwavelength gratings. Polarization effects on such gratings were calculated and shown by Stenkamp et al [2] before. They used a 100 nm period grating etched in a 100 nm thick tungsten layer.…”
Section: Polarizing Elementsmentioning
confidence: 99%
“…For this purpose we used metallic subwavelength gratings. Polarization effects on such gratings were calculated and shown by Stenkamp et al [2] before. They used a 100 nm period grating etched in a 100 nm thick tungsten layer.…”
Section: Polarizing Elementsmentioning
confidence: 99%
“…In the 1960s, WGPs operating in the infrared region were fabricated [1][2][3]. Since the 1990s, WGPs for the visible region have been fabricated with nanostructures using electron beam lithography (EBL) [4][5][6][7][8][9]. Wang and coworkers fabricated WGPs by using narrow strips less than 100 nm that could be used over a large range of wavelengths, such as the deep UV to near infrared light [9].…”
Section: Introductionmentioning
confidence: 99%
“…Integration capability with other optical components is another issue due to their special fabrication process. To make high quality, commercially viable, integration capable thin-film type polarizers, in the past few decades, researchers have kept thinking of new ideas and corresponding fabrication processes [1][2][3][4][5][6][7][8][9][10][11][12][13][14]. Metal wire-grid [2][3][4][5][6][7][8][9][10][11][12][13][14][15] is one potential candidate for making high quality integration capable thin-film type polarizer (and/or polarizing beam splitter).…”
Section: Introductionmentioning
confidence: 99%
“…In the past many decades, constant efforts [2][3][4][5][6][7][8][9][10][11][12][13][14] have been made trying to make commercially viable high quality wire-grid polarizers. It was realized that lithography is needed to make good quality wire-grid polarizers.…”
Section: Introductionmentioning
confidence: 99%