2005
DOI: 10.1117/12.617898
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High-performance large-area ultra-broadband (UV to IR) nanowire-grid polarizers and polarizing beam-splitters

Abstract: Aluminum nanowire-grid polarizers and polarizing beam splitters with a fixed pitch (i.e., period) of ~146 nm but a wide range of linewidths (from < 60 nm to 90 nm) and heights (from 150 nm to 200 nm) are studied. Immersion interference lithography, UV-nanoimprint lithography and aluminum reactive ion etching were used to fabricate the nanowire-grid polarizers. Optical performance of the nanowire-grid polarizers was characterized in a broad spectral range from UV (< 400 nm) to near infrared (> 1700 nm). The per… Show more

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Cited by 6 publications
(3 citation statements)
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References 23 publications
(45 reference statements)
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“…To do so, a mold was fabricated first. We used deep-UV interference lithography to make a 148 nm-period mold on a 100 mm in-diameter glass wafer [33][34][35]. For making the nanowire-grid polarizer, we started with a 100 mm in-diameter BK7 wafer coated on one side with a 130 nm thick aluminum film by a high vacuum evaporation.…”
Section: Immersed Metal Nano-grating Polarizersmentioning
confidence: 99%
See 1 more Smart Citation
“…To do so, a mold was fabricated first. We used deep-UV interference lithography to make a 148 nm-period mold on a 100 mm in-diameter glass wafer [33][34][35]. For making the nanowire-grid polarizer, we started with a 100 mm in-diameter BK7 wafer coated on one side with a 130 nm thick aluminum film by a high vacuum evaporation.…”
Section: Immersed Metal Nano-grating Polarizersmentioning
confidence: 99%
“…Then a thin layer (~180 nm) of UV curable low-viscosity resist layer was spin-coated on [7]. A UV nano-imprint process was used to pattern the resist with the previously made mold [35]. After imprint and O 2 polymer truncate [7], a chlorine-based reactive ion etching (RIE) with 60 sccm BCl 3 and 50 sccm Cl 2 at 5 mtorr was then used to etch aluminum into nanogratings.…”
Section: Immersed Metal Nano-grating Polarizersmentioning
confidence: 99%
“…The extinction ratio reached 103, but the transmittance was less than 60%. Wang et al [19] developed a polariser with a transverse magnetic (TM) transmittance greater than 90%; however, in the visible regime, the TE transmittance rose to ~10%, and the extinction ratio was less than 10. Thus, despite these achievements, it has been difficult to achieve high TM transmittance and high extinction ratios simultaneously with integrated polarisation detection.…”
Section: Introductionmentioning
confidence: 99%