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Superelastic carbon microcoils (SCMCs) with high elasticity and coiling chirality were prepared by the Ni-catalyzed pyrolysis of acetylene, and novel tactile microsensor elements using the SCMCs as the sensor material were prepared. The sensor elements with a very small size of 80×80×80μm3 showed a very high sensitivity of 0.3mgf (1Pa). It was found that the SCMC arraying in the matrix and the placement method on the electrodes dramatically affected the sensing properties.

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SiC polycrystalline layers were deposited on a graphite substrate from a gas mixture of CH3SiCl3+H2(+Ar) at temperatures in the range of 800–1200 °C. The effects of the source gas flow rate (CH3SiCl3+H2), total pressure, linear velocity and Ar flux addition on the phase of the deposits were examined in some detail. The deposition of a single-phase of SiC was accelerated at a higher linear velocity by reducing the total pressure and by addition of Ar flux at atmospheric pressure. The effect of Ar addition on acceleration of the SiC deposition may be caused by an increasing linear velocity and ‘‘dilution effect’’ of reactant gases.

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