T h e BzHe-and PHs-partial pressure dependence of the doping concentration of in-situ doped silicon films, deposited in the temperature range between 6 0 0 and 7500C by low pressure chemical vapor deposition has been investigated for two different substrate orientations. In addition, the influence of BzHs and PHs and their partial pressure o n the silicon growth rate has been studied. It is found that the doping concentration can b e controlled over a wide range, and that in the presence of PHs as well a s BzHe the silicon growth is reduced. In the case of boron doping, the in-situ doping has been used to fabricate delta-doped silicon layers.
Abstract-The intermodulation distortion (IMD) of a 5-GHzHTS resonator is precisely measured and a nonlinear analysis is conducted. When designing a radio communication system that uses an HTS microwave device, the device's IMD characteristic is one of the most important problems that must be quantitatively evaluated. The amplitudes of third-order IMD (IMD3) and higher-order IMD, which are generated in an HTS resonator given a two-tone fundamental signal, are measured in detail using a fundamental signal cancellation circuit. Moreover, the relative phase of IMD3 is obtained by using a novel measurement system constructed around a reference IMD3 generator. The measured IMD3 phase shows a drastic change in a relatively low IMD3 amplitude region. In addition, the measured resonator exhibits strong higher-order IMD. A nonlinear evaluation using complex power series representation confirms that the drastic phase change may be due to the higher-order distortions present in IMD3.
The long-size electro-optic ceramics of (Pb,La)(Zr,Ti)O, were fabricated by combination of partial-coprecipitation and doctorblade method. The PLZT powder with sub-micron of particle size and excellent dispersed w a s prepard by using (Zr,Ti)02 solid solution powdewr which w a s synthesised according to coprecipitation method, PbO and La20a powders. The long-sized PLZT ceramics with 30 cm of length and 2 mm of thickness molded by doctor-blade method and then ordinary sintered.
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