In this paper, SU-8 EPON-based photoresist (PR) polymerization optimization and its possible microfluidic and MEMS applications are reported. First, the optimization results of SU-8 under UV lithography are reported. The parameters which could have an influence on the lithography quality were chosen and optimized by a three-level, L9 orthogonal array of the Taguchi method. By optimization, the optimal parameter range and the weighted per cent of a parameter on the final results were determined. For SU-8-5 and SU-8-50, many microstructures with thicknesses of more than 100 and 500 µm and aspect ratios of more than 20 and 50 were obtained with high resolution. The optimization results show that the prebake time plays the key role in the quality, which is different from the previously published results. With the optimization results obtained, some possible applications of SU-8 were developed and demonstrated. These applications included using SU-8 as a structural material for a microfluidic system, as a micromold for electroplating, as a master for plastic hot-embossing, and even as a mask for some wet-etching processes.
In this paper we describe an experimental method and an analytical model for characterizing the surface energy inside a microchannel of micrometer size by measuring the marching velocity or position of a capillary meniscus. This method is based on the fact that the force summation of the meniscus surface tension and the filling reservoir gravitation might produce a pressure to pull liquid into the channel, and the marching velocity or the instantaneous position of the meniscus is related to the surface energy. Both parylene and silicon-nitride microchannels with different surface conditions were fabricated to perform the fill-in experiments subject to different liquids. It is shown that our model agrees well with the experimental data and is a valid method.
This paper proposes a novel technique for fabricating micro patterns of glutaraldehyde (GA)-crosslinked gelatin. It provides another means to crosslink gelatin other than using photo-sensitizing agents, and the micro patterns of GA-crosslinked gelatin can still be made successfully by accessing conventional photolithography. A much less toxic and increased biocompatible approach to strengthening the gelatin microstructures can be developed according to this idea. This paper also describes a potential methodology for using GA-crosslinked gelatin patterns as single-cell culture bases. The best spatial resolution of the micro gelatin bases can reach 10 microm, and the selective growing density of human Mesenchymal stem cells on the gelatin patterns surpasses the density on the glass substrate by 2-3 orders of magnitude.
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