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The increasing demand of piezoelectric energy harvesters for wearable and implantable applications requires biocompatible materials and careful structural device design, paying special attention to the conformability characteristics, properly tailored to scavenge continuously electrical energy even from the tiniest body movements. This paper provides a comprehensive study on a flexible and biocompatible aluminum nitride (AlN) energy harvester based on a new alternative fabrication approach, exploiting a thin polyimide (PI) substrate, prepared by spin coating of precursors solution. This strategy allows manufacturing substrates with adjustable thickness to meet conformability requirements. The device is based on a piezoelectric AlN thin film, sputtered directly onto the soft PI substrate, without poling/annealing processes and patterned by simple and low cost microfabrication technologies. AlN active layer, grown on soft substrate, exhibits good morphological and structural properties with roughness root mean squared (R rms ) of 6.35 nm, columnar texture and (002) c-axis orientation. Additionally, piezoelectric characterization has been performed and the extracted piezoelectric coefficient value of AlN thin film resulted to be 4.93 ± 0.09 pm/V. The fabricated flexible AlN energy harvester generates an output peak-to-peak voltage of ∼1.4 V and a peak-to-peak current up to 1.6 μA, under periodical deformation, corresponding to a current density of 2.1 μA/cm 2 , and providing a maximum generated power of 1.57 μW under optimal resistive load. Furthermore, the AlN energy harvester exhibits high elasticity and resistance to mechanical fatigue. High quality AlN piezoelectric layers on elastic substrates with tunable thicknesses pave the way for the development of a straightforward technological platform for wearable/implantable energy harvesters and biomechanical sensors.

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Vascular grafts are artificial conduits properly designed to substitute a diseased blood vessel. However prosthetic fail can occur without premonitory symptoms. Continuous monitoring of the system can provide useful information not only to extend the graft’s life but also to optimize the patient’s therapy. In this respect, various techniques have been used, but all of them affect the mechanical properties of the artificial vessel. To overcome these drawbacks, an ultrathin and flexible smart patch based on piezoelectric Aluminum Nitride (AlN) integrated on the extraluminal surface of the prosthesis is presented. The sensor can be conformally wrapped around the external surface of the prosthesis. Its design, mechanical properties and dimensions are properly characterized and optimized in order to maximize performances and to avoid any interference with the graft structure during its activity. The sensorized graft is tested in vitro using a pulsatile recirculating flow system that mimics the physiological and pathological blood flow conditions. In this way, the ability of the device to measure real-time variations of the hemodynamics parameters has been tested. The obtained high sensitivity of 0.012 V Pa −1 m −2 , joint to the inherent biocompatibility and non-toxicity of the used materials, demonstrates that the device can successfully monitor the prosthesis functioning under different conditions, opening new perspectives for real-time vascular graft surveillance.

Colorimetric and electrochemical (bio)sensors are commonly employed in wearable platforms for sweat monitoring; nevertheless, they suffer from low stability of the sensitive element. In contrast, mass-(bio)sensors are commonly used for analyte detection at laboratory level only, due to their rigidity. To overcome these limitations, a flexible mass-(bio)sensor for sweat pH sensing is proposed. The device exploits the flexibility of piezoelectric AlN membranes fabricated on a polyimide substrate combined to the sensitive properties of a pH responsive hydrogel based on PEG-DA/CEA molecules. A resonant frequency shift is recorded due to the hydrogel swelling/shrinking at several pH. Our device shows a responsivity of about 12 kHz/pH unit when measured in artificial sweat formulation in the pH range 3–8. To the best of our knowledge, this is the first time that hydrogel mass variations are sensed by a flexible resonator, fostering the development of a new class of compliant and wearable devices.

The development of wearable technology increasingly requires bendable sensing devices operating across multiple domains for opto‐electro‐mechanical and biochemical transduction. Piezoelectric materials integrated into flexible and transparent device architectures can enable multiple‐sensing platforms. It is shown that flexible and compliant surface‐acoustic‐wave (SAW) piezoelectric devices include all these features and can be applied to the human body. A flexible and transparent aluminum‐nitride‐(AlN)‐based SAW device on a thermoplastic polyethylene naphthalate (PEN) substrate, fabricated by low‐temperature sputtering deposition of a multilayered AlN‐based stack, is reported for the first time. Two resonant modes, corresponding to Rayleigh and Lamb wave propagation, are shown and compared with a control SAW device on a silicon substrate. A large transmission‐signal amplitude, up to 20 dB, is achieved for the Lamb resonance mode around 500 MHz at an acoustic velocity of 10 500 m s−1. The technology is applied to the fabrication of a wearable temperature sensor. Compared to the same piezoelectric stack and SAW technology onto silicon substrates, the AlN/PEN SAW shows better performance and a temperature coefficient frequency as high as ≈810 ppm °C−1. The potential of this flexible SAW device as a wearable temperature sensor based on Rayleigh modes is demonstrated.

Deglutition disorders (dysphagia) are common symptoms of a large number of diseases and can lead to severe deterioration of the patient’s quality of life. The clinical evaluation of this problem involves an invasive screening, whose results are subjective and do not provide a precise and quantitative assessment. To overcome these issues, alternative possibilities based on wearable technologies have been proposed. We explore the use of ultrathin, compliant, and flexible piezoelectric patches that are able to convert the laryngeal movement into a well-defined electrical signal, with extremely low anatomical obstruction and high strain resolution. The sensor is based on an aluminum nitride thin film, grown on a soft Kapton substrate, integrated with an electrical charge amplifier and low-power, wireless connection to a smartphone. An ad-hoc designed laryngeal motion simulator (LMS), which is able to mimic the motions of the laryngeal prominence, was used to evaluate its performances. The physiological deglutition waveforms were then extrapolated on a healthy volunteer and compared with the sEMG (surface electromyography) of the submental muscles. Finally, different tests were conducted to assess the ability of the sensor to provide clinically relevant information. The reliability of these features permits an unbiased evaluation of the swallowing ability, paving the way to the creation of a system that is able to provide a point-of-care automatic, unobtrusive, and real-time extrapolation of the patient’s swallowing quality even during normal behavior.