AlN-based flexible piezoelectric skin for energy harvesting from human motion

Guido, Francesco; Qualtieri, Antonio; Algieri, Luciana; Lemma, Enrico Domenico; Vittorio, Massimo De; Todaro, M. T.

doi:10.1016/j.mee.2016.03.041

Cited by 62 publications

(35 citation statements)

References 16 publications

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“…The introduction of piezoelectric materials into flexible device architectures can further expand FED applications to both sensing and mechanical energy harvesting. Indeed, piezoelectric biosensors have been recently applied to the evaluation of physical and chemical health parameters, and to nanogenerators, for recovering energy from human motion and converting it into electricity for powering portable and wearable electronics or implantable biomedical devices (e.g., cardiac‐tachometers, pacemakers). This class of devices is commonly fabricated on silicon substrate; however, the integration of piezoelectrics on various flexible polymers can make these devices bendable, compliant with nonplanar and irregular surfaces, and, possibly, transparent in the visible spectral range.…”

Section: Introductionmentioning

confidence: 99%

“…Both are thermally and chemically stable, biocompatible, and transparent in the visible spectral range, these latter characteristics being fundamental for the development of (bio)optomechanical sensors. AlN is a piezoelectric ceramic material and by virtue of its good piezoelectric and dielectric properties, complementary metal‐oxide‐semiconductor (CMOS)‐based processing compatibility, and biocompatibility, it is a good candidate to produce compact and efficient piezoelectric FEDs . These feature indicate a AlN as a good candidate for the biomedical applications.…”

Section: Introductionmentioning

confidence: 99%

“…Generally, AlN films can be grown using several techniques, such as reactive sputtering, molecular beam epitaxy, laser ablation, and chemical vapor deposition . Among these methods, the reactive sputtering technique is considered to be the favorable choice because of its capability to easily deposit high (0002) orientation AlN at relatively low temperature (<200 °C), compatible with standard integrated circuit (IC) technology and with a few polymeric substrates, including flexible polyimide; in particular Guido et al have achieved good result with sputtering deposition of AlN on thin film Kapton 25 µm with a low residual stress …”

Section: Introductionmentioning

confidence: 99%

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Flexible and Transparent Aluminum‐Nitride‐Based Surface‐Acoustic‐Wave Device on Polymeric Polyethylene Naphthalate

Lamanna

Rizzi

Guido

et al. 2019

Adv Elect Materials

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The development of wearable technology increasingly requires bendable sensing devices operating across multiple domains for opto‐electro‐mechanical and biochemical transduction. Piezoelectric materials integrated into flexible and transparent device architectures can enable multiple‐sensing platforms. It is shown that flexible and compliant surface‐acoustic‐wave (SAW) piezoelectric devices include all these features and can be applied to the human body. A flexible and transparent aluminum‐nitride‐(AlN)‐based SAW device on a thermoplastic polyethylene naphthalate (PEN) substrate, fabricated by low‐temperature sputtering deposition of a multilayered AlN‐based stack, is reported for the first time. Two resonant modes, corresponding to Rayleigh and Lamb wave propagation, are shown and compared with a control SAW device on a silicon substrate. A large transmission‐signal amplitude, up to 20 dB, is achieved for the Lamb resonance mode around 500 MHz at an acoustic velocity of 10 500 m s−1. The technology is applied to the fabrication of a wearable temperature sensor. Compared to the same piezoelectric stack and SAW technology onto silicon substrates, the AlN/PEN SAW shows better performance and a temperature coefficient frequency as high as ≈810 ppm °C−1. The potential of this flexible SAW device as a wearable temperature sensor based on Rayleigh modes is demonstrated.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Flexible and Transparent Aluminum‐Nitride‐Based Surface‐Acoustic‐Wave Device on Polymeric Polyethylene Naphthalate

Lamanna

Rizzi

Guido

et al. 2019

Adv Elect Materials

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“…For instance, a pressure energy harvester made with prestressed piezoelectric discs has provided an output power density of >10 mW cm −3 which is the record for the energy harvesters made of piezoelectric ceramics, especially for conventional PZT . There are many publications available for the topic of prestressed piezoelectric energy harvesters …”

Section: Development Of Single‐source Energy Harvestersmentioning

confidence: 99%

Energy Harvesting Research: The Road from Single Source to Multisource

2018

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Energy harvesting technology may be considered an ultimate solution to replace batteries and provide a long-term power supply for wireless sensor networks. Looking back into its research history, individual energy harvesters for the conversion of single energy sources into electricity are developed first, followed by hybrid counterparts designed for use with multiple energy sources. Very recently, the concept of a truly multisource energy harvester built from only a single piece of material as the energy conversion component is proposed. This review, from the aspect of materials and device configurations, explains in detail a wide scope to give an overview of energy harvesting research. It covers single-source devices including solar, thermal, kinetic and other types of energy harvesters, hybrid energy harvesting configurations for both single and multiple energy sources and single material, and multisource energy harvesters. It also includes the energy conversion principles of photovoltaic, electromagnetic, piezoelectric, triboelectric, electrostatic, electrostrictive, thermoelectric, pyroelectric, magnetostrictive, and dielectric devices. This is one of the most comprehensive reviews conducted to date, focusing on the entire energy harvesting research scene and providing a guide to seeking deeper and more specific research references and resources from every corner of the scientific community.

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“…Um desenvolvimento de estrutura flexível, com material piezelétrico para ser inserido em uma luva, de tal maneira que o movimento mecânico de um dos dedos da mão possa ser convertido em energia elétrica, também é introduzido em (GUIDO et al, 2016). Dessa forma, o estudo reforça a importância do desenvolvimento de estruturas que capturem o movimento de alguma parte do corpo humano e converta em eletricidade para alimentação de dispositivos portáteis e acumuladores de energia, muitos que possam ser utilizados na biomedicina.…”

Section: Energy Harvestingunclassified

Projeto robusto e análise de incertezas em dispositivos ressonantes para coleta de energia

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AlN-based flexible piezoelectric skin for energy harvesting from human motion

Cited by 62 publications

References 16 publications

Flexible and Transparent Aluminum‐Nitride‐Based Surface‐Acoustic‐Wave Device on Polymeric Polyethylene Naphthalate

Flexible and Transparent Aluminum‐Nitride‐Based Surface‐Acoustic‐Wave Device on Polymeric Polyethylene Naphthalate

Energy Harvesting Research: The Road from Single Source to Multisource

Projeto robusto e análise de incertezas em dispositivos ressonantes para coleta de energia

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