Piezoelectric MEMS vibrational energy harvesters: Advances and outlook

This paper proposes a bimorph piezoelectric vibration energy harvester (PVEH) with a flexible 3D meshed-core elastic layer for improving the output power while lowering the resonance frequency. Owing to the high void ratio of the 3D meshed-core structure, the bending stiffness of the cantilever can be lowered. Thus, the deflection of the harvester and the strain in the piezoelectric layer increase. According to vibration tests, the resonance frequency is 15.8% lower and the output power is 68% higher than in the conventional solid-core PVEH. Compared to the solid-core PVEH, the proposed meshed-core PVEH (10 mm × 20 mm × 280 μm) has 1.3 times larger tip deflection and the maximum output power is 24.6 μW under resonance condition at 18.7 Hz and 0.2G acceleration. Hence it can be used as a power supply for low-power-consumption sensor nodes in wireless sensor networks.

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“…Here, the resonance frequency is lower compared with other piezoelectric cantilever-type vibration energy harvesters [4,5,27]. …”

Section: Resultsmentioning

confidence: 99%

Bimorph piezoelectric vibration energy harvester with flexible 3D meshed-core structure for low frequency vibration

Tsukamoto

Umino

Shiomi

et al. 2018

Science and Technology of Advanced Materials

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“…The mostly used ferroelectrics replacements are e.g. the Barium Titanate (BTO), Sodium Potassium Niobate (KNN) or Bismuth Sodium Titanate (BNT) [3][4][5][6][7].…”

Section: Piezoceramic Materialsmentioning

confidence: 99%

Electro-mechanical analysis of a multilayer piezoelectric cantilever energy harvester upon harmonic vibrations

et al. 2018

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This paper addresses an important issue of the individual layer thickness influence in a multilayer piezo composite on electro-mechanical energy conversion. The use of energy harvesting systems seems to be very promising for applications such as ultra-low power electronics, sensors and wireless communication. The energy converters are often disabled due to a failure of the piezo layer caused by an excessive deformation/stresses occurring upon the operation. It is thus desirable to increase both reliability and efficiency of the electromechanical conversion as compared to standard concepts. The proposed model of the piezoelectric vibration energy harvester is based on a multilayer beam design with active piezo and protective ceramic layers. This paper presents results of a comparative study of an analytical and numerical approach used for the electro-mechanical simulations of the multilayer energy harvesting systems. Development of the functional analytical model is crucial for the further optimization of new (smart material based) energy harvesting systems, since it provides much faster response than the numerical model.

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“…Moreover, piezoelectric materials have an inherent capability to directly convert mechanical stress/strain energy into electrical energy, therefore, such devices are compact and possess simpler designs, compared to their electromagnetic and electrostatic counterparts. Furthermore, such devices can be fabricated by micromachining techniques and directly integrated into monolithic, micro-electro-mechanical systems (MEMS) [6].…”

Section: Introductionmentioning

confidence: 99%

Simple and Efficient AlN-Based Piezoelectric Energy Harvesters

et al. 2020

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In this work, we demonstrate the simple fabrication process of AlN-based piezoelectric energy harvesters (PEH), which are made of cantilevers consisting of a multilayer ion beam-assisted deposition. The preferentially (001) orientated AlN thin films possess exceptionally high piezoelectric coefficients d33 of (7.33 ± 0.08) pC∙N−1. The fabrication of PEH was completed using just three lithography steps, conventional silicon substrate with full control of the cantilever thickness, in addition to the thickness of the proof mass. As the AlN deposition was conducted at a temperature of ≈330 °C, the process can be implemented into standard complementary metal oxide semiconductor (CMOS) technology, as well as the CMOS wafer post-processing. The PEH cantilever deflection and efficiency were characterized using both laser interferometry, and a vibration shaker, respectively. This technology could become a core feature for future CMOS-based energy harvesters.

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Piezoelectric MEMS vibrational energy harvesters: Advances and outlook

Cited by 122 publications

References 128 publications

Bimorph piezoelectric vibration energy harvester with flexible 3D meshed-core structure for low frequency vibration

Bimorph piezoelectric vibration energy harvester with flexible 3D meshed-core structure for low frequency vibration

Electro-mechanical analysis of a multilayer piezoelectric cantilever energy harvester upon harmonic vibrations

Simple and Efficient AlN-Based Piezoelectric Energy Harvesters

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