It has been found for the first time that laser-induced chemical vapor deposition (LICVD) processed nano-Si3N4 possesses strong piezoelectric effects. The piezoelectricity of LICVD nano-Si3N4 stems from the charge accumulation in the interfaces and the surfaces of microvoids.
Pressure sensitive capacitance of laser-induced chemical vapor deposition processed nanosized silicon nitride has been studied. It is found that the capacitance varies linearly with the pressure and its sensitivity is as high as 2.64 pf/Torr. The capacitance pressure sensitivity results from the huge interfaces and microvoids existing in the nanomaterials.
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