Kuo-Lung Fang scite author profile

Excimer laser is used for back channel etched (BCE) a-Si TFT fabrication for the first time. KrF laser could easily and successfully lift-off ITO on photo-resist comparing to traditional chemical lift-off process. Besides, this maskless laser lift-off technology could save much process time from mask alignment step. The mechanism of laser assisted ITO lift-off (LAIL) technology was carefully studied in this paper. With suitable laser fluence energy, ITO could be precisely patterned as designed. Very wide range of laser fluence energy was obtained in our LAIL technology. TFT device fabricated by LAIL technology exhibits the same electrical characteristics performance as traditional non-lift-off one.

show abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Kuo-Lung Fang

Anisotropic Thermal Conductivity of Nanoporous Silica Film

A Current Estimation Method for Bias-Temperature Stress of a-Si TFT Device

A Novel Wafer Reclaim Method for Amorphous SiC and Carbon Doped Oxide Films

P‐3: Laser Assisted ITO Lift‐off for TFT Fabrication

Contact Info

Product

Resources

About