Through-Silicon-Via (TSV) is the enabling technology for the finegrained 3D integration of multiple dies into a single stack. These TSVs occupy non-negligible silicon area because of their sheer size. This significant silicon area occupied by the TSVs and the interconnections made to the TSVs greatly affect area, power, performance, and reliability of 3D IC layouts. Well-managed TSVs alleviate congestion, reduce wirelength, and improve performance, whereas excessive TSVs not only increase the die area, but also have negative impact on many design objectives. In this paper, we study the impact of TSV on various aspects of 3D layouts. We use GDSII layouts of 2D and 3D designs, and thoroughly compare the pros and cons of TSV usage. We propose a new force-directed 3D gate-level placement that efficiently handles TSVs. In addition, we present an algorithm that assigns TSVs to nets to complete routing that involves TSVs. This algorithm, together with our 3D placer, is integrated into a commercial P&R tool to generate fully validated GDSII layouts. Our experiments based on synthesized benchmarks indicate that our algorithms help generate GDSII layouts of 3D designs that are optimized in terms of area, wirelength, and metal layer count.

As the geometry shrinking faces severe limitations, 3D wafer stacking with through silicon via (TSV) has gained interest for future SOC integration. Since TSV fill material and silicon have different coefficients of thermal expansion (CTE), TSV causes silicon deformation due to different temperatures at chip manufacturing and operating. The widely used TSV fill material is copper which causes tensile stress on silicon near TSV. In this paper, we propose systematic TSV stress aware timing analysis and show how to optimize layout for better performance. First, we generate a stress contour map with an analytical radial stress model. Then, the tensile stress is converted to hole and electron mobility variations depending on geometric relation between TSVs and transistors. Mobility variation aware cell library and netlist are generated and incorporated in an industrial timing engine for 3D-IC timing analysis. It is interesting to observe that rise and fall time react differently to stress and relative locations with respect to TSVs. Overall, TSV stress induced timing variations can be as much as ± 10% for an individual cell. Thus as an application for layout optimization, we can exploit the stress-induced mobility enhancement to improve timing on critical cells. We show that stress-aware perturbation could reduce cell delay by up to 14.0% and critical path delay by 6.5% in our test case.

Abstract-Through-silicon via (TSV) fabrication causes tensile stress around TSVs which results in significant carrier mobility variation in the devices in their neighborhood. Keep-out zone (KOZ) is a conservative way to prevent any devices/cells from being impacted by the TSV-induced stress. However, owing to already large TSV size, large KOZ can significantly reduce the placement area available for cells, thus requiring larger dies which negate improvement in wirelength and timing due to 3D integration. In this paper, we study the impact of KOZ dimension on stress, carrier mobility variation, area, wirelength, and performance of 3D ICs. We demonstrate that, instead of requiring large KOZ, 3D-IC placers must exploit TSV stressinduced carrier mobility variation to improve the timing and area objectives during placement. We propose a new TSV stress-driven force-directed 3D placement that consistently provides placement result with, on average, 21.6% better worst negative slack (WNS) and 28.0% better total negative slack (TNS) than wirelengthdriven placement.

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Through-Silicon-Via (TSV) is the enabling technology for the finegrained 3D integration of multiple dies into a single stack. These TSVs occupy non-negligible silicon area because of their sheer size. This significant silicon area occupied by the TSVs and the interconnections made to the TSVs greatly affect area, power, performance, and reliability of 3D IC layouts. Well-managed TSVs alleviate congestion, reduce wirelength, and improve performance, whereas excessive TSVs not only increase the die area, but also have negative impact on many design objectives. In this paper, we study the impact of TSV on various aspects of 3D layouts. We use GDSII layouts of 2D and 3D designs, and thoroughly compare the pros and cons of TSV usage. We propose a new force-directed 3D gate-level placement that efficiently handles TSVs. In addition, we present an algorithm that assigns TSVs to nets to complete routing that involves TSVs. This algorithm, together with our 3D placer, is integrated into a commercial P&R tool to generate fully validated GDSII layouts. Our experiments based on synthesized benchmarks indicate that our algorithms help generate GDSII layouts of 3D designs that are optimized in terms of area, wirelength, and metal layer count.