In this paper, the development of compact transmission soft x-ray microscopy (XM) with sub-50 nm spatial resolution for biomedical applications is described. The compact transmission soft x-ray microscope operates at lambda = 2.88 nm (430 eV) and is based on a tabletop regenerative x-ray source in combination with a tandem ellipsoidal condenser mirror for sample illumination, an objective micro zone plate and a thinned back-illuminated charge coupled device to record an x-ray image. The new, compact x-ray microscope system requires the fabrication of proper x-ray optical devices in order to obtain high-quality images. For an application-oriented microscope, the alignment procedure is fully automated via computer control through a graphic user interface. In imaging studies using our compact XM system, a gold mesh image was obtained with 45 nm resolution at x580 magnification and 1 min exposure. Images of a biological sample (Coscinodiscus oculoides) were recorded.

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We demonstrate compact transmission soft X-ray microscope system with 50 nm spatial resolution for the life and physical science. This x-ray microscope operates at photon energy from 284 eV to 543 eV, so called 'water window' region (2.3~4.4nm), where natural contrast between carbon (protein) and oxygen(water) allows imaging of unstained biological material in their natural, hydrated environment. The compact transmission soft x-ray microscope is based on a laser plasma x-ray source, tandem ellipsoidal condenser reflective optics, diffractive zone plate optics and x-ray sensitive charge-coupled device (CCD) to record an x-ray image. The source is a liquid-jet target laser plasma source, which is practically debris free and suitable for high average power operation. The flux, brightness and bandwidth of this source has been simulated and optimized for X-ray microscopy for biology application. A tandem ellipsoidal reflective mirror operates as condenser and illuminates the sample. The high resolution imaging is currently performed with a ~12% efficient nickel zone plate with an outmost zone width of 35nm. In conclusion, we suggested a possibility of the compact soft x-ray microscopy system with 50 nm spatial resolution as a suitable tool for the wide range of studies such as biological imaging, environmental samples, and nanostructure analysis.