Articles you may be interested inEffect of V 2 O 5 concentration on structural and optical properties of WO 3 thin films prepared by RF magnetron sputtering AIP Conf. Ferroelectric (Pb,La)(Zr,Ti)O3 epitaxial thin films on sapphire grown by rfplanar magnetron sputtering J. Appl. Phys. 60, 736 (1986); 10.1063/1.337423 rf planar magnetron sputtering and characterization of ferroelectric Pb(Zr,Ti)O3 films J.

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Rectangular-apertured micro-Fresnel lens arrays are proposed. These lens arrays have been fabricated by an electron-beam writing system specially developed for the fabrication of microoptical devices. It is experimentally demonstrated that the lens arrays showed uniform focusing characteristics, and that each lens exhibited a diffraction-limited focusing characteristic with efficiency of 74%.

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Blazed reflection micro-Fresnel lenses and their use in an integrated focus sensor are proposed. Theoretical analysis indicates that the optical characteristics of reflection Fresnel lenses can be improved compared with a conventional transmission micro-Fresnel lens. These reflection Fresnel lenses were fabricated using electron-beam lithography and exhibited the diffraction-limited focusing characteristics with 71% high efficiency. The focus sensor has a folded optical path and includes a beam splitter integrated with thin film components, such as a reflection elliptical Fresnel lens and a quadrant photodetector. The reflection elliptical Fresnel lens in the focus sensor exhibiting excellent astigmatic characteristics agreed with the theoretical results, and the focus error signal was detected. This sensor can be developed as the optical head of an optical disk system.

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Micro groove machining is an important task in the fabrication of microdevices. Modern microdevices need metal micromachining techniques such as electro-discharge machining (EDM) and lasers. Micro EDM is a versatile technique for machining electrically conductive materials to make components for microsystem technologies. However, it is generally considered a slow process, because the material removal rate (MRR) is relatively low compared to other machining processes. In this paper, we propose a method to increase the MRR. Foil is used as a tool electrode in the machining of micro grooves and micro slits in brass. We have achieved material removal rates as high as 0.002 mm 3 min −1 .