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The liquid desiccant air-conditioning system allows reducing energy consumption compared to the conventional compressor-type air conditioners. In order to develop desiccant materials for air conditioners, we have investigated the dehumidification capability of quaternary ammonium Ionic Liquids (ILs) and the equilibrium water vapor pressure of aqueous solutions of these ammonium salts. Among the seven tested types of ILs, 2-hydroxy- N , N , N -trimethylethan-1-aminium dimethylphosphate ([Ch][DMPO 4 ]) displayed the best dehumidification capability and the lowest equilibrium water vapor pressure. Furthermore, the 80% aqueous solution of [Ch][DMPO 4 ] exhibited a less corrosive effect on four types of metals, i.e., steel (hot dip zinc-aluminum alloy plated steel), copper (C1100P), aluminum (A5052), and stainless steel (SUS: SUS304). It should be noted that this [Ch][DMPO 4 ] is not only non-toxic but also exhibits a stable nature; the aqueous solution produced no odor after storing for over 1 year under ambient conditions.

An electron beam (EB) lithography method using inedible cellulose-based resist material derived from woody biomass has been successfully developed. This method allows the use of pure water in the development process instead of the conventionally used tetramethylammonium hydroxide and anisole. The inedible cellulose-based biomass resist material, as an alternative to alpha-linked disaccharides in sugar derivatives that compete with food supplies, was developed by replacing the hydroxyl groups in the beta-linked disaccharides with EB-sensitive 2-methacryloyloxyethyl groups. A 75 nm line and space pattern at an exposure dose of 19 μC/cm2, a resist thickness uniformity of less than 0.4 nm on a 200 mm wafer, and low film thickness shrinkage under EB irradiation were achieved with this inedible cellulose-based biomass resist material using a water-based development process.

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