Poly‐Si TFTs were fabricated by both a YAG2ω laser and an excimer laser annealing system using a same TFT manufacturing process, and the electrical characteristics of the TFTs were compared. As a result, it is found that a wider process window can be obtained with the YAG2ω laser annealing system. The possibility of overlapped irradiation is also shown.
SUMMARYA new delta arranged cell-configured AC plasma display (DIA-PDP) was proposed, and a prototype 46-inch diagonal panel was fabricated. The DIA-PDP has two features. The first feature is an improved luminous efficiency. This is possible because nondischarge cells are formed in the panel and a black layer is formed on these cells. Since the light from the discharge cells does not reach the nondischarge cells, even if a black layer is provided on the nondischarge cells, the panel reflectance can be reduced without lowering the luminance. When compared under the condition of a constant set reflectivity, the luminous efficiency improves. A 33% improvement over the conventional ratio was verified for the 46-inch panel. The second feature is improved vertical resolution. In the delta configuration, the subpixels are arranged at half the pitch of the scanning lines. By combining this configuration with an interlaced drive, the vertical resolution can be improved. To increase the size of a PDP using a lattice rib, we introduced a new rib forming technology and improved the exhaust conductance. Previously, the manufacturing steps increased to form the exhaust path in the lattice rib. In the new rib forming method, the exhaust conductance was successfully improved without increasing the number of manufacturing steps only for forming the crossing ribs in the nondischarge cells and by producing height differences caused by thermal shrinkage.
We have developed a new optical system that transforms the circle profile beam generated with near-Gaussian intensity distribution by a pulse green laser (YAG2omega laser; second harmonics of a Q-switched Nd:YAG laser) into a line-profile beam. For homogenization in the longitudinal direction, we employed a waveguide plate-type homogenizer. We successfully reduced interference fringes. In the width direction, the laser beam was focused up to the limited M2 value. This transformed beam has a uniform distribution to within 5% in the longitudinal direction, and it is approximately 100 mm long and 40 microm wide.
We have developed a new optical system that transforms the circle profile beam generated with near Gaussian intensity distribution by a pulsed green laser (second harmonics of a Q-switched Nd: YAG laser) into a lineprofile beam. This transformed beam has uniform distribution to within 5% in the longitudinal direction, and is about 100 mm long and 40wide. In the width direction, the laser beam is focused to the limited M2 value. For homogenization in the longitudinal direction, we employ a one dimensionnal waveguide plate type homogenizer. The laser beam is divided by waveguide plates, and the divided beams are overlapped on the surface of the works. We successfully reduced interference fringes by increasing the fixed optical pass difference beyond the inherent time and coherent length for every divided pair of adjacent beams under a controlled space coherent length.
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