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The paper describes a low temperature bond process based on an oxygen plasma pretreatment followed by 200°C and 400°C annealing which was to be integrated in our technological process flow to produce micromechanical devices in bulk and surface micromachining like acceleration sensors, gyroscopes and mirror arrays [1]. The results of infrared transmission and the measured bond strengths of the prepared test wafers will be presented in dependence on various pre-treatments and annealing times as well as temperatures. First die separation tests as well as additional detailed investigations showed that the bonding process has the potential to replace an anodic bonding process. During the development of the low temperature bond process it was shown that it is possible to reach a bond strength between 1.5 J/m2 and 2.8 J/m2 depending on the annealing conditions. To optimize the necessary size of the bond frame and to quantify the bond strength limits of the process a test pattern was designed with different arrangements of sensor structures like bond frames, spaces and chevron notch structures. The investigation showed the achieved bond yield in dependence on different sensor structures and bond conditions.

Abstract. In this chapter, the various automotive applications for GMR based sensors are presented. The different applications have different requirements which are reflected in the individual sensor concept and features. The advantage of GMR based magnetic sensors over conventional silicon based Hall sensors is shown.

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The optical response of PtSi/p-Si Schottky barrier detectors structured with a lamellar grating was investigated. The quantum efficiency Y for TE and TM polarized light for different samples with grating constants Λ=3 μm, 4 μm, 5 μm, and with a grating amplitude h=1100 nm was measured. The ratio YTM/YTE strongly depends on the back bias of the diode. Theoretical calculations are presented which explain the results taking into account the locally varying Schottky barrier height and optical absorption induced by the grating.