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Ca and Sr doped ZnO films with c-axis prefer orientation have been grown on the STcut quartz substrate by RF magnetron sputtering technique. Crystalline structures and roughness characteristics of films were examined by X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM). The effects of doping elements and concentrations on sensor's sensitivity were investigated. A suitable ZnO guiding layer for high sensitivity Love wave sensor applications could be obtained by tailoring the roughness. Smooth and over rough guiding layers decrease the sensitivity of Love wave sensor.