Microstructure and Nano-wear Property of Si-doped Diamond-like Carbon Films Deposited by a Hybrid Sputtering System

Zhang, T.F.; Pu, Jui-Chen; Xia, Qixun; Son, Myoung Jun; Kim, K.H.

doi:10.1016/j.matpr.2016.02.032

Cited by 10 publications

(6 citation statements)

References 23 publications

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“…A similar effect was also observed in the case of series J_4 and J_5 for which one of the layers is a DLC:Si layer. The agglomerated structure was also observed by Zhang et al [29], who obtained an DLC:Si structure on monocrystalline silicone (100) with the clusters that were not an effect of the rough surface of polyurethane. Leal et al [30] obtained DLC:N structures on the same substrate and the investigations proved that increasing the concentration of nitrogen in the gas mixture from 40 to 60 vol% caused an increase in the roughness.…”

Section: Morphology and Topography Analysessupporting

confidence: 75%

Deposition, morphology and functional properties of layers based on DLC:Si and DLC:N on polyurethane

et al. 2020

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DLC:Si and DLC:N (diamond-like carbons doped with Si or N) functional layers in different configurations are deposited on polyurethane (PU) for bioengineering applications using CCP (capacitively coupled plasma) discharge generated in the PE CVD (plasma-enhanced chemical vapor deposition) system. Scanning electron microscopy (SEM) observations show that the obtained single and multilayers are continuous and well adherent to the substrates, but they differ in surface morphologies. DLC:Si layers form granular-like outer surfaces, while DLC:N ones a mosaic structure of plain areas. Topography analyses by atomic force microscopy (AFM) and optical profilometry reveal that Si-doped layers are characterized by significantly higher surface roughness (Ra ca. 5 nm) in comparison to N-doped layers (Ra ca. 0.3 nm) and also higher values of profile roughness parameter Rz (up to 32 μm vs. about 13 μm). Energy-dispersive X-ray spectroscopy (EDS) analysis indicates the homogenous chemical composition of the layers. DLC:N layers, are characterized by significantly higher polar component of surface free energy (up to ca. 5.0 mJ/m2). DLC:Si layers exhibit higher values of diiodomethane contact angle (up to ca. 90°) compared with DLC:N layers (up to ca. 55°). The attenuated total reflectance Fourier transform infrared spectroscopic measurements (ATR-FTIR) of the layers reveal that the addition of silicon to the DLC structure increases the content of terminal CHn bonds (n = 1, 2, 3) as well as beneficial Si–H and Si–CHn bonds, which significantly reduce the internal stresses in the layers. Both DLC:Si and DLC:N layers exhibit no cytotoxic effects using the human osteoblast-like cell line and human keratinocytes.

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Section: Morphology and Topography Analysessupporting

confidence: 75%

Deposition, morphology and functional properties of layers based on DLC:Si and DLC:N on polyurethane

et al. 2020

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“…In addition, the presence of a nitride sublayer under the DLC layer based on the Cr-Al-Si system increases the strength of the external DLC layer's adhesive bond with Nevertheless, due to the introduction of silicon into its composition during the deposition process, a formed DLC-Si layer makes it possible to significantly increase the DLC layer's thermal stability and expand the field of application of such coatings in this case [75,81,82]. In addition, the presence of a nitride sublayer under the DLC layer based on the Cr-Al-Si system increases the strength of the external DLC layer's adhesive bond with the tool base [83][84][85] and contributes to the formation of secondary wear-resistant phases during high-temperature heating [86][87][88][89][90]. When heated in oxygen, the coating components can form nonstoichiometric oxide phases, contributing to the change in the contact interaction between the ceramic article and the counter body nature [91][92][93].…”

Section: Influence Of Dlc Coatings On the Transformation Of The Sintered Ceramic Blanks Characteristicsmentioning

confidence: 99%

Development of DLC-Coated Solid SiAlON/TiN Ceramic End Mills for Nickel Alloy Machining: Problems and Prospects

et al. 2021

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The study is devoted to the development and testing of technological principles for the manufacture of solid end mills from ceramics based on a powder composition of α-SiAlON, β-SiAlON, and TiN additives, including spark plasma sintering powder composition, diamond sharpening of sintered ceramic blanks for shaping the cutting part of mills and deposition of anti-friction Si-containing diamond-like carbon (DLC) coatings in the final stage. A rational relationship between the components of the powder composition at spark plasma sintering was established. The influence of optimum temperature, which is the most critical sintering parameter, on ceramic samples’ basic physical and mechanical properties was investigated. DLC coatings’ role in changing the surface properties of ceramics based on SiAlON, such as microrelief, friction coefficient, et cetera, was studied. A comparative analysis of the efficiency of two tool options, such as developed samples of experimental mills made of SiAlON/TiN and commercial samples ceramic mills based on SiAlON, doped with stabilizing additives containing Yb when processing nickel alloys (NiCr20TiAl alloy was used as an example). DLC coatings’ contribution to the quantitative indicators of the durability of ceramic mills and the surface quality of machined products made of nickel alloy is shown.

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“…Fujimoto et al [26] found the hardness and friction coefficient increases with increasing tetramethylsilane flow ratio (or Si content). Zhang et al [27] reported that the hardness of Si doped diamond-like carbon (Si-DLC) film initially increases and then decreases, while its wear rate firstly decreases and then increases with the increase of Si content. However, Jiang [28] et al observed the opposite results from Zhang's research [27].…”

Section: Introductionmentioning

confidence: 99%

“…Zhang et al [27] reported that the hardness of Si doped diamond-like carbon (Si-DLC) film initially increases and then decreases, while its wear rate firstly decreases and then increases with the increase of Si content. However, Jiang [28] et al observed the opposite results from Zhang's research [27]. Clearly, there is no agreement on the effect of Si content (or deposition parameters) on the properties of the films.…”

Section: Introductionmentioning

confidence: 99%

Optimizing the Microstructure, Mechanical, and Tribological Properties of Si-DLC Coatings on NBR Rubber for Its Potential Applications

et al. 2020

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Si doped diamond-like carbon (Si-DLC) films were deposited on nitrile-butadiene rubber (NBR), and the effects of deposition parameters on the mechanical and tribological properties of an Si-DLC top layer on NBR were investigated. Then, the sample with the best performance is selected to investigate its tribological behaviors and mechanism under different contact loads. The results show that the growth rate and the doped Si content are also decreased with increasing the CH4 flow rate. The Si atom exists in the form of Si-C bonds at low CH4 flow rate (≤40 sccm) and Si-C + Si-O-C bonds at high CH4 flow rate (≥60 sccm). Furthermore, the sp3 content increases monotonously, while the hardness and H3/E2 ratio firstly decreases and then increases. As a result, the friction and wear behaviors are in line with the change trend of the hardness. The lowest friction coefficient (~0.19) and a slight wear were achieved for the Si-DLC3 film under the relatively high load of 3 N. The tribological results indicate that the friction coefficient and wear increase monotonously with the increase of load, which is mainly attributed to the brittle fragmentation of films at a higher load, and thus a high strength and super toughness DLC films should be needed. Furthermore, the friction and wear behaviors of samples depend critically on its surface topography, and the wear is lower when the friction direction is parallel to the stripes.

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Microstructure and Nano-wear Property of Si-doped Diamond-like Carbon Films Deposited by a Hybrid Sputtering System

Cited by 10 publications

References 23 publications

Deposition, morphology and functional properties of layers based on DLC:Si and DLC:N on polyurethane

Deposition, morphology and functional properties of layers based on DLC:Si and DLC:N on polyurethane

Development of DLC-Coated Solid SiAlON/TiN Ceramic End Mills for Nickel Alloy Machining: Problems and Prospects

Optimizing the Microstructure, Mechanical, and Tribological Properties of Si-DLC Coatings on NBR Rubber for Its Potential Applications

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