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A new fabrication method for a three-dimensional (3D), single-crystal silicon micro-probe structure is developed. A probe card structure requires tips that are at least 50 µm tall on cantilevers thick enough to withstand a few mN of force as well as 50 µm of tip bending. The cantilever structure also must be able to move at least 50 µm of vertical motion, requiring a large sacrificial gap. The developed 3D fabrication method is based on the surface/bulk micromachining technology, which can fabricate released, high aspect ratio, single-crystal silicon microstructures with high yield using (111) silicon.

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To overcome light interference, including a large DC offset and ambient light variation, a robust photoplethysmogram (PPG) readout chip is fabricated using a 0.13-μm complementary metal–oxide–semiconductor (CMOS) process. Against the large DC offset, a saturation detection and current feedback circuit is proposed to compensate for an offset current of up to 30 μA. For robustness against optical path variation, an automatic emitted light compensation method is adopted. To prevent ambient light interference, an alternating sampling and charge redistribution technique is also proposed. In the proposed technique, no additional power is consumed, and only three differential switches and one capacitor are required. The PPG readout channel consumes 26.4 μW and has an input referred current noise of 260 pArms.

A low power and low noise reconfigurable analog front-end (AFE) system on a chip (SoC) for biosignal acquisition is presented. The presented AFE can be reconfigured for use in electropotential, bioimpedance, electrochemical, and photoelectrical modes. The advanced healthcare services based on multiparameter physiological biosignals can be easily implemented with these multimodal and highly reconfigurable features of the proposed system. The reconfigurable gain and input referred noise of the core instrumentation amplifier block are 25 dB to 52 dB, and 1 μVRMS, respectively. The power consumption of the analog blocks in one readout channel is less than 52 μW. The reconfigurable capability among various modes of applications including electrocardiogram, blood glucose concentration, respiration, and photoplethysmography are shown experimentally.