Surface/bulk micromachined single-crystalline-silicon micro-gyroscope

Lee, Sang‐Woo; Park, Sangjun; Kim, Jongpal; Lee, Sangchul; Cho, Dong‐il Dan

doi:10.1109/84.896779

Cited by 84 publications

(23 citation statements)

References 9 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…This Coriolis force causes the displacement or strain of the detecting part for each gyroscope. The vibrating displacement or strain can be measured by the change of capacitance, 9,17) piezoresistance, 21) or piezoelectricity. 22)…”

Section: Resultsmentioning

confidence: 99%

See 1 more Smart Citation

Mechanical Vibration Characteristics for the Driving Part in Array of Microelectromechanical Systems Vibratory Gyroscopes

Miyake

Hirata

Suzuki

2012

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

Over the past ten years, much effort to develop microelectromechanical system (MEMS) gyroscopes with the “tactical” and “inertial” grade has been made. Although several techniques are proposed to increase the sensitivity, each of them has serious tradeoffs with other characteristics. We propose a new approach to accomplish the increase in sensitivity. The overall gyroscope consists of gyroscope elements arrayed in an X–Y matrix. Each gyroscope element is connected with two types of beams, coupling and connecting beams, and is excited in the antiphase vibration mode. First, this array configuration takes the advantage of the large scale factor of N 2, the square of the number of elements, for the sensitivity over a simply large chip (the sensitivity is proportional to N). Second, the vibrational characteristics are not changed from those for a single element irrespective of the number of elements. Therefore, much effort in design can be saved. 1×2 and 2×2 arrays with the resonant frequency of approximately 5 kHz were fabricated and evaluated in terms of the resonant frequency and amplitude for each element. They agreed well with those of a single gyroscope. This indicates that the proposed array helps to reduce the task of frequency tuning, which is needed for conventional 1×2 gyroscope arrays. It is also useful to fabricate a highly resonant gyroscope, which is immune to environmental noise.

show abstract

Section: Resultsmentioning

confidence: 99%

“…Figure 1 shows a schematic of a vibratory gyroscope. 17) When a proof mass m is driven in the x-axis with the velocity v and rotated by the angular velocity , the y-axis Coriolis force exerted on the proof mass is given by…”

Section: Principlementioning

confidence: 99%

Mechanical Vibration Characteristics for the Driving Part in Array of Microelectromechanical Systems Vibratory Gyroscopes

Miyake

Hirata

Suzuki

2012

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

show abstract

“…Therefore, the method proposed in ref. 19 can be applied to create a uniform conductive layer on the structure. Table I lists typical process parameters used in the SRM process.…”

Section: Srm Process For Fabricating Released Structuresmentioning

confidence: 99%

Single-Run Single-Mask Inductively-Coupled-Plasma Reactive-Ion-Etching Process for Fabricating Suspended High-Aspect-Ratio Microstructures

Yang

Kuo

Fan

2006

jjap

View full text Add to dashboard Cite

In this work, we present a single-run single-mask (SRM) process for fabricating suspended high-aspect-ratio structures on standard silicon wafers using an inductively coupled plasma-reactive ion etching (ICP-RIE) etcher. This process eliminates extra fabrication steps which are required for structure release after trench etching. Released microstructures with 120 mm thickness are obtained by this process. The corresponding maximum aspect ratio of the trench is 28. The SRM process is an extended version of the standard process proposed by BOSCH GmbH (BOSCH process). The first step of the SRM process is a standard BOSCH process for trench etching, then a polymer layer is deposited on trench sidewalls as a protective layer for the subsequent structure-releasing step. The structure is released by dry isotropic etching after the polymer layer on the trench floor is removed. All the steps can be integrated into a single-run ICP process. Also, only one mask is required. Therefore, the process complexity and fabrication cost can be effectively reduced. Discussions on each SRM step and considerations for avoiding undesired etching of the silicon structures during the release process are also presented.

show abstract

“…Note that commercial MEMS gyroscopes have been widely employed in robots for localization, navigation, and motion control [27,28]. MEMS gyroscopes detect the Coriolis force on a vibrating proof mass and measure the angular velocity [29,30]. However, they have two drawbacks, which are attributed to their sensing mechanisms.…”

Section: Introductionmentioning

confidence: 99%

Development and evaluation of haltere-mimicking gyroscope for three-axis angular velocity sensing using a haltere-mimicking structure pair

Kim

Park²,

Kim³

et al. 2022

Bioinspir. Biomim.

View full text Add to dashboard Cite

This paper presents a three-axis biomimetic gyroscope, mimicking the haltere of Diptera. Diptera uses a club-shaped mechanosensory organ called the haltere to get the three-axis angular velocity information, namely roll, pitch and yaw axes, for flight control. One pair of halteres is physically connected to the wings of Diptera that vibrate in antiphase to the flapping wings in ambient air. They sense the Coriolis force and relay angular velocity information to the Diptera. As an alternative to the conventional micro-electro-mechanical systems (MEMS) gyroscopes which are widely used in robotics, many research groups have attempted to mimic the haltere. However, no previous study succeeded in measuring all three-axis components of angular velocity due to various shortcomings. In this paper, we developed the first three-axis haltere-mimicking gyroscope. Two perpendicularly positioned haltere-mimicking structures that can vibrate at a 180 ˚ amplitude were mechanically integrated into a robot actuator. Two accelerometers placed at the tip of each structure were employed to measure the Coriolis force. The performance of the novel biomimetic gyroscope was measured in all rotational directions, using a motion capture system as the ground truth. One-axis input experiments were performed 240 times at different input magnitudes and directions, and the measured orientation error was less than ± 2.0 % in all experiments. In 80 three-axis input experiments, the orientation error was less than ± 3.5 %.

show abstract

Surface/bulk micromachined single-crystalline-silicon micro-gyroscope

Cited by 84 publications

References 9 publications

Mechanical Vibration Characteristics for the Driving Part in Array of Microelectromechanical Systems Vibratory Gyroscopes

Mechanical Vibration Characteristics for the Driving Part in Array of Microelectromechanical Systems Vibratory Gyroscopes

Single-Run Single-Mask Inductively-Coupled-Plasma Reactive-Ion-Etching Process for Fabricating Suspended High-Aspect-Ratio Microstructures

Development and evaluation of haltere-mimicking gyroscope for three-axis angular velocity sensing using a haltere-mimicking structure pair

Contact Info

Product

Resources

About