We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 105 around 1550 nm wavelength. The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.

We report on the fabrication of crystalline lithium niobate microresonators with quality factors above 10, as measured around 770 nm wavelength. Our technique relies on femtosecond laser micromachining for patterning a mask coated on the lithium niobate on insulate (LNOI) into a microdisk, followed by a chemo-mechanical polishing process for transferring the disk-shaped pattern to the LNOI. Nonlinear processes including second-harmonic generation and Raman scattering have been demonstrated in the fabricated microdisk.

Crystalline lithium niobate (LN) is an important optical material because of its broad transmission window that spans from ultraviolet to mid-infrared and its large nonlinear and electro-optic coefficients. Furthermore, the recent development and commercialization of LN-on-insulator (LNOI) technology has opened an avenue for the realization of integrated on-chip photonic devices with unprecedented performances in terms of propagation loss, optical nonlinearity, and electro-optic tunability. This review begins with a brief introduction of the history and current status of LNOI photonics. We then discuss the fabrication techniques of LNOI-based photonic structures and devices. The recent revolution in the LN photonic industry has been sparked and is still being powered by innovations of the nanofabrication technology of LNOI, which enables the production of building block structures, such as optical microresonators and waveguides of unprecedented optical qualities. The following sections present various on-chip LNOI devices categorized into nonlinear photonic and electro-optic tunable devices and photonic-integrated circuits. Some conclusions and future perspectives are provided.