Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

Lin, Jintian; Xu, Yang; Fang, Zhiwei; Wang, Min; Song, Jiangxin; Wang, Nengwen; Qiao, Lingling; Fang, Wei; Cheng, Ya

doi:10.1038/srep08072

Cited by 197 publications

(131 citation statements)

References 44 publications

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“…By etching rings or disks into the lithium niobate films, WGRs with diameters of several 10 µm with quality factors up to 10 6 were realized [66][67][68][69][70][71].…”

Section: On-chip Resonatorsmentioning

confidence: 99%

Three‐wave mixing in whispering gallery resonators

Breunig

2016

Laser & Photonics Reviews

147

109

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We review the progress in the development of frequency converters based on three-wave mixing in whispering gallery resonators (WGRs). The theoretical description, given in a unified notation for all basic processes, reveals that the phase-matching condition known from conventional devices is replaced by several selection rules and, furthermore, the fact that conversion efficiencies of more than 25% can be reached in the overcoupled regime only. Experimentally, the conversion efficiencies exceed 50% already at milliwatt input powers. This is achieved, however, so far in bulk resonators only since today the on-chip devices have two orders of magnitude lower quality factors. Regarding the stability of the conversion process, one has to consider impurities left from the crystal growth and material specific effects like photoconductivity, photorefractivity, and pyroelectricity. The impressive experimental progress paves the way that micrometer-sized frequency converters based on WGRs will find the way out of the lab into real-world applications.

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“…By etching rings or disks into the lithium niobate films, WGRs with diameters of several 10 µm with quality factors up to 10 6 were realized [66][67][68][69][70][71].…”

Section: On-chip Resonatorsmentioning

confidence: 99%

Three‐wave mixing in whispering gallery resonators

Breunig

2016

Laser & Photonics Reviews

147

109

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“…Some encouraging results were obtained in studies of LNOI-based optical elements, such as photonic crystals [4,5], high-Q microresonators [6][7][8], ridge-waveguides [9,10], proton-exchanged waveguides [11][12][13] and modulators [14], hybrid lightwave circuits LNOI-SOI [15], etc. These results indicate that LNOI is an appropriate platform for integrated optics.…”

Section: Introductionmentioning

confidence: 99%

Domain Patterning in Ion-Sliced LiNbO3 Films by Atomic Force Microscopy

Volk

Гайнутдинов

Zhang³

2017

Crystals

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Photonic structures denoted as LNOI (LiNbO 3 -on-insulator) are of considerable interest for integrated optics due to a high refractive-index contrast provided by the interface LiNbO 3 /insulator. A topical problem for LNOI-based optical waveguides is optical-frequency conversion, in particular realized on ferroelectric domains on the basis of quasi phase-matching principle. This paper presents extended studies on the fabrication of domain patterns by atomic force microscopy (AFM) methods (raster lithography, piezo-force microscopy, conductive AFM) in single-crystal ion-sliced LiNbO 3 films forming LNOI sandwiches. A body of data obtained on writing characteristics of domains and specified 1D and 2D domain patterns permitted us to manipulate the domain sizes and shapes. Of special importance is the stability of created patterns, which persist with no degradation during observation times of months. The domain coalescence leading to the transformation of a discrete domain pattern to a continuous one was investigated. This specific effect-found in thin LiNbO 3 layers for the first time-was attributed to the grounding of space-charges accumulated on domain walls. Observations of an enhanced static conduction at domain walls exceeding that in surrounding areas by not less than by five orders of magnitude supports this assumption. AFM domain writing in ion-sliced films serves as a basis for studies in nonlinear photonic crystals in integrated optical schemes.

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“…For instance, Kuo et al [86] have exploited the high nonlinear susceptibility of gallium arsenide to generate a WGM second-harmonic spectrum ( Figure 8A), while Haigh et al [90] have enhanced Brillouin scattering by tuning of a magneto-optical yttrium iron garnet spherical cavity system. Recent materials/complexes of choice include diamond ( Figure 8B) [87], constrained germanium-tin alloy ( Figure 8C) [88], crystalline lithium niobate ( Figure 8D) [89], high-Q magnesium fluoride [91], or caesium lead halide perovskite-coated silica [92]. There are also magneto-and electrostrictive materials that suffer deformations from an applied field [93] and some isotropic crystalline platforms whose thermal characteristics enable nano-Kelvin thermometry, e.g.…”

Section: Potential Materialsmentioning

confidence: 99%

Advances in optoplasmonic sensors – combining optical nano/microcavities and photonic crystals with plasmonic nanostructures and nanoparticles

et al. 2017

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Nanophotonic device building blocks, such as optical nano/microcavities and plasmonic nanostructures, lie at the forefront of sensing and spectrometry of trace biological and chemical substances. A new class of nanophotonic architecture has emerged by combining optically resonant dielectric nano/microcavities with plasmonically resonant metal nanostructures to enable detection at the nanoscale with extraordinary sensitivity. Initial demonstrations include single-molecule detection and even single-ion sensing. The coupled photonic-plasmonic resonator system promises a leap forward in the nanoscale analysis of physical, chemical, and biological entities. These optoplasmonic sensor structures could be the centrepiece of miniaturised analytical laboratories, on a chip, with detection capabilities that are beyond the current state of the art. In this paper, we review this burgeoning field of optoplasmonic biosensors. We first focus on the state of the art in nanoplasmonic sensor structures, high quality factor optical microcavities, and photonic crystals separately before proceeding to an outline of the most recent advances in hybrid sensor systems. We discuss the physics of this modality in brief and each of its underlying parts, then the prospects as well as challenges when integrating dielectric nano/microcavities with metal nanostructures. In Section 5, we hint to possible future applications of optoplasmonic sensing platforms which offer many degrees of freedom towards biomedical diagnostics at the level of single molecules.

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Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

Cited by 197 publications

References 44 publications

Three‐wave mixing in whispering gallery resonators

Three‐wave mixing in whispering gallery resonators

Domain Patterning in Ion-Sliced LiNbO3 Films by Atomic Force Microscopy

Advances in optoplasmonic sensors – combining optical nano/microcavities and photonic crystals with plasmonic nanostructures and nanoparticles

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