We report on the fabrication of crystalline lithium niobate microresonators with quality factors above 10, as measured around 770 nm wavelength. Our technique relies on femtosecond laser micromachining for patterning a mask coated on the lithium niobate on insulate (LNOI) into a microdisk, followed by a chemo-mechanical polishing process for transferring the disk-shaped pattern to the LNOI. Nonlinear processes including second-harmonic generation and Raman scattering have been demonstrated in the fabricated microdisk.

No abstract

In this paper, we develop a technique for realizing multi-centimeter-long lithium niobate on insulator (LNOI) waveguides with a propagation loss as low as 0.027 dB/cm. Our technique relies on patterning a chromium thin film coated on the top surface of LNOI into a hard mask with a femtosecond laser followed by chemo-mechanical polishing for structuring the LNOI into the waveguides. The surface roughness on the waveguides was determined with an atomic force microscope to be 0.452 nm. The approach is compatible with other surface patterning technologies, such as optical and electron beam lithographies or laser direct writing, enabling high-throughput manufacturing of large-scale LNOI-based photonic integrated circuits.

No abstract

No abstract

No abstract

We discuss the recent breakthrough in the field of photonic integrated circuits for generating high-quality photonic structures on lithium niobate (LN) on insulator (LNOI). This is enabled by the development of chemo-mechanical polish lithography (CMPL). We begin with a brief introduction of the background, followed by the description of the CMPL technique that holds the promise for realizing LNOI waveguides of ultralow propagation loss approaching the absorption limit of LN. We demonstrate fabrication of low loss optical waveguides with the CMPL and construction of beamsplitters with the fabricated LNOI waveguides. At last, some conclusions and future perspectives will be given.A video abstract of this article can be found at: https://youtu.be/sgnecU_QzcY KEYWORDS chemo-mechanical polish lithography (CMPL), femtosecond laser micromachining, lithium niobate on insulator (LNOI), photonic integrated circuit (PIC), waveguides Quantum Engineering. 2019;1:e9.wileyonlinelibrary.com/journal/que2

No abstract