Piezoelectric actuators (PEAs) have been widely used in micro-and nanopositioning applications due to their fine resolution, fast responses, and large actuating forces. However, the existence of nonlinearities such as hysteresis makes modeling and control of PEAs challenging. This paper reviews the recent achievements in modeling and control of piezoelectric actuators. Specifically, various methods for modeling linear and nonlinear behaviors of PEAs, including vibration dynamics, hysteresis, and creep, are examined; and the issues involved are identified. In the control of PEAs as applied to positioning, a review of various control schemes of both model-based and non-model-based is presented along with their limitations. The challenges associated with the control problem are also discussed. This paper is concluded with the emerging issues identified in modeling and control of PEAs for future research.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.