A Survey of Modeling and Control of Piezoelectric Actuators

Abstract

Piezoelectric actuators (PEAs) have been widely used in micro-and nanopositioning applications due to their fine resolution, fast responses, and large actuating forces. However, the existence of nonlinearities such as hysteresis makes modeling and control of PEAs challenging. This paper reviews the recent achievements in modeling and control of piezoelectric actuators. Specifically, various methods for modeling linear and nonlinear behaviors of PEAs, including vibration dynamics, hysteresis, and creep, are examined; and the issues involved are identified. In the control of PEAs as applied to positioning, a review of various control schemes of both model-based and non-model-based is presented along with their limitations. The challenges associated with the control problem are also discussed. This paper is concluded with the emerging issues identified in modeling and control of PEAs for future research.

A fast non-singular terminal sliding mode control based on perturbation estimation for piezoelectric actuators systems

“…PEAs have the advantages such as high mechanical and electrical coupling, fast response, no mechanical losses with low temperature generation and high precision, which are able to deliver nanometer positioning resolution up to a few micrometers (Adriaens, De Koning, & Banning, 2000). Consequently, PEAs have been used in a wide range of micro/nano positioning application such as biotechnology, optical inspection tracking applications, e.g., atomic force microscopy (AFM) (J.-W. Wu, Lin, Lo, Liu, & Fu, 2015), Micro/Nano manipulators (Liaw, Shirinzadeh, & Smith, 2008) and many other areas (Peng & Chen, 2013). However, the PEAs drawbacks are also obvious for instance, temperature dependence, drift in time and hysteresis effect.…”

ANFIS controller based on RBF identification for piezoelectric actuator in a positioning system

“…For achieving higher precision, designer should develop proper control algorithm to eliminate the positioning error caused by the nonlinear hysteresis effect. Numerous control alghorithms and compensations for piezo-actuator have been investigated in the past decades [6]. A feed-forward controller is used in [7] to control a piezoelectric actuator using Inverse preisach model.…”

Recent Advances in the Control of Piezoelectric Actuators

“…Open-loop control schemes are usually employed in applications in which position feedback is difficult to implement due to mechanical constraints [57]. As shown in Figure 14, this control method has a simple structure, and it is convenient to implement.…”

“…For an input V, the output is given by g[H(v)]. The structural vibrations and some of the apparent rate-dependence in the hysteresis effect are captured in a linear model g and the hysteresis nonlinearity H is captured, using, e.g., a rate-independent Preisach hysteresis model [57].…”