Articles you may be interested inAdvanced numerical technique for analysis of surface and bulk acoustic waves in resonators using periodic metal gratings

No abstract

This paper discusses the use of periodically slotted top electrodes in the film bulk acoustic resonator (FBAR) structure for the realization of wideband coupled-resonator filters (CRFs), where evanescent modes in the periodic structure are used for the coupling between adjacent electrodes. First, wave propagation in this structure is investigated. Finite element analysis is performed for the Mo/ZnO/Mo structure. The result suggests that lateral wave propagation is controlled by the Bragg reflection, and that transverse modes can be suppressed when the structure is properly designed. Next, a CRF is designed. It is shown that wideband CRFs are realizable when the period, thickness, and width of slotted electrodes are properly set.

No abstract

Theoretical analysis showed that high performance surface acoustic wave (SAW) resonator with an extremely large electromechanical coupling factor K2 could be realized on Y cut X propagating Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 (YX-PIN-PMN-PT) substrate. A one-port SAW resonator was designed, fabricated, and characterized on Cu-grating/YX-PIN-PMN-PT substrate structure. The experimental results demonstrate that very large K2 of 57.3% is realizable. Such an extremely large K2 makes PIN-PMN-PT single crystal great potential for realizing wideband SAW filters and tunable SAW filters. The influence of inhomogeneity and instability of the domain structure on the fabricated resonators has been discussed thoroughly for further improvement of the devices.