Transverse mode suppression in the AlN lamb wave resonators by “piston mode”

Zou, Jie; Liu, Jiansong; Tang, Gongbin; Lin, Chih‐Ming; Lam, C.S.

doi:10.1109/ultsym.2017.8092899

Cited by 10 publications

(2 citation statements)

References 13 publications

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“…Yet, the zoom-in observation of the spectrum revealed strong transverse spurious between f s and f p . This is likely to be resolved by the adoption of a novel IDT design [40] and will be further investigated in the next iteration of this platform. Nevertheless, the overall decent performance of the devices co-designed and co-fabricated in this AlN MEMS platform indicates the excellent potential of mass producing a S 0 LWR under a commercial FBAR platform.…”

Section: Measurement Resultsmentioning

confidence: 99%

An 8-inch commercial aluminum nitride MEMS platform for the co-existence of Lamb wave and film bulk acoustic wave resonators

Hsu

Tung

Huang

et al. 2023

J. Micromech. Microeng.

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This work investigates a co-design approach for fundamental symmetric Lamb wave (S0) resonators (LWR) and film bulk acoustic wave resonators (FBAR) in a commercial 8-inch aluminum nitride (AlN) microelectromechanical system (MEMS) platform to enable multi-band operation. The platform utilizes surface micromachining to define local release cavities, providing an undercut-free solution for acoustic resonators to achieve a high quality factor (Q). However, being based on a standardized platform initially tailored for FBAR devices, many design considerations and trade-offs need to be investigated for the co-existence between LWR and FBAR design. Hence, to capture the optimal design window for S0 LWRs while analyzing its performance impact on existing FBARs, the electrode configuration and its thickness are thoroughly investigated by the finite element method (FEM). In this work, a 2.2 GHz FBAR, a 700 MHz S0 LWR, and a 2.19 GHz S0 Lamé LWR are demonstrated for performance evaluation across different types of devices in this platform. The measurement results revealed a baseline performance for the FBAR device with an electromechanical coupling factor (kt 2) of 6.73% and Q of 3,017 at 2.2 GHz, resulting in a high figure-of-merit (FoM = kt 2∙Q) over 200. In comparison, the 700 MHz S0 LWR exhibits a high Q of 2,532 as well and a kt 2 of 1.1% (FoM = 27.8), while the 2.19 GHz S0 Lamé LWR also exhibits a high Q of 1,752 and a kt 2 of 2.44% (FoM = 42.7), respectively. These performance indexes are all comparable with the current state-of-the-art, revealing the excellent potential of this AlN MEMS platform being implemented for future LWR development design or even mass production.

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Section: Measurement Resultsmentioning

confidence: 99%

An 8-inch commercial aluminum nitride MEMS platform for the co-existence of Lamb wave and film bulk acoustic wave resonators

Hsu

Tung

Huang

et al. 2023

J. Micromech. Microeng.

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“…11,12,17) Suppression of transverse mode resonances is always one of the most important research targets for any kind of acoustic wave resonators. [18][19][20][21] For this purpose, various techniques were proposed; apodization of an interdigital transducer (IDT), 22) weighted dummy electrodes, 23) selective removal 24) of the waveguide structure, and piston mode (PM) design. 21,[25][26][27] Recently, the authors pointed out that when the rotated Y-cut LN is employed for the A 1 Lamb mode resonator, transverse mode resonances and lateral energy leakage can be suppressed well for a wide frequency range by placing release windows (etched holes) near the IDT electrode tips.…”

Section: Introductionmentioning

confidence: 99%

Broadband piston mode operation of solidly mounted resonator employing A₁ Lamb mode on lithium niobate

Wu¹,

Wong²,

Wu³

et al. 2021

Jpn. J. Appl. Phys.

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This paper discusses the impact of etched holes given to the solidly mounted resonator (SMR)-supported A1 Lamb mode resonators. The authors pointed out that the etched holes are effective at suppressing the lateral leakage and the transverse mode resonances for free-standing A1 Lamb mode resonators, and the technique was named the broadband piston mode (BPM). First, the SMR structure is designed for an A1 Lamb mode resonator, and it is shown that the release windows are effective in the suppression of transverse mode resonances even when the SMR is added. Detailed analysis is given to spurious responses that newly appeared by applying the SMR. Then, the discussion is extended to the impact of partial etching of the SMR layers underneath the release windows. The result indicates that the etching of the top SMR layer is enough for recovery of the BPM function.

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Tilted Interdigital-transducer in NS-SAW Resonator for Transverse Mode Suppression

Bao

et al. 2022

2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)

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Transverse mode suppression in the AlN lamb wave resonators by “piston mode”

Cited by 10 publications

References 13 publications

An 8-inch commercial aluminum nitride MEMS platform for the co-existence of Lamb wave and film bulk acoustic wave resonators

An 8-inch commercial aluminum nitride MEMS platform for the co-existence of Lamb wave and film bulk acoustic wave resonators

Broadband piston mode operation of solidly mounted resonator employing A₁ Lamb mode on lithium niobate

Tilted Interdigital-transducer in NS-SAW Resonator for Transverse Mode Suppression

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Transverse mode suppression in the AlN lamb wave resonators by “piston mode”

Cited by 10 publications

References 13 publications

An 8-inch commercial aluminum nitride MEMS platform for the co-existence of Lamb wave and film bulk acoustic wave resonators

An 8-inch commercial aluminum nitride MEMS platform for the co-existence of Lamb wave and film bulk acoustic wave resonators

Broadband piston mode operation of solidly mounted resonator employing A1 Lamb mode on lithium niobate

Tilted Interdigital-transducer in NS-SAW Resonator for Transverse Mode Suppression

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Broadband piston mode operation of solidly mounted resonator employing A₁ Lamb mode on lithium niobate