An apparatus and data analysis methodology is described which allows determination of response time to oxygen concentration changes of luminescent oxygen sensor coatings. Utilizing a solenoid valve, a sample chamber creates a pressure jump from 0.1 to 700 Torr in 600 μs that is followed by 15 ms of ringing. An optical detection system measures the response of porphyrin-based luminescent oxygen sensors to the pressure jump. The pressure in the chamber is measured simultaneously and independently with a piezoresistive pressure transducer. Data analysis techniques using nonlinear least-squares and numerical convolution of the luminescent response to the pressure rise allow determination of response times of the oxygen sensor. The response to pressure jumps of several luminescent oxygen sensitive coatings designed for video luminescent barometry are measured with this computer-controlled instrument. Several coatings were studied with response times of ∼2.5 s, ∼400 ms, 11 ms, 1.5 ms, and <25 μs. Studies of the system suggest that we can determine response times down to about 10 μs.
In this paper we demonstrate a novel acoustic wave pressure sensor, based on an aluminum nitride (AlN) piezoelectric thin film. It contains an integrated vacuum cavity, which is micro-fabricated using a cavity silicon-on-insulator (SOI) wafer. This sensor can directly measure the absolute pressure without the help of an external package, and the vacuum cavity gives the sensor a very accurate reference pressure. Meanwhile, the presented pressure sensor is superior to previously reported acoustic wave pressure sensors in terms of the temperature drift. With the carefully designed dual temperature compensation structure, a very low temperature coefficient of frequency (TCF) is achieved. Experimental results show the sensor can measure the absolute pressure in the range of 0 to 0.4 MPa, while the temperature range is from 20 °C to 220 °C with a TCF of −14.4 ppm/°C. Such a TCF is only about half of that of previously reported works.
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