Highly sensitive thick diaphragm-based surface acoustic wave pressure sensor

Memon, Maria Muzamil; Pan, Shuliang; Wan, Jiang; Wang, Tao; Zhang, Wanli

doi:10.1016/j.sna.2021.112935

Cited by 17 publications

(14 citation statements)

References 27 publications

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“…1 lists the pressure sensitivities of SAW pressure sensors reported in some typical works. It can be found that the sensitivity in this work is higher than that reported in [3][4][5][6] and [13,14]. Then it is interesting to investigate the reasons for the high pressure sensitivity of our SAW pressure sensor.…”

Section: Resultsmentioning

confidence: 59%

“…On the other hand, the SAW pressure sensors reported in [3][4][5][6] and [13,14] are diaphragm-type SAW pressure sensors, which means that the SAW resonator was fabricated or pasted on the diaphragm. According to Sinha's research [8], the pressure subjected to the diaphragm could be regarded as biaxial stress (strain).…”

Section: Resultsmentioning

confidence: 99%

“…The sensitivity was about 191 ppm/MPa. Memon et al [4] put forth a distinctive approach to further enhance pressure sensitivity by applying strain along the SAW propagation direction. The sensitivity was improved to 228 ppm/MPa.…”

Section: Introductionmentioning

confidence: 99%

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Highly Sensitive SAW Pressure Sensor Based on Simply Supported Beam

Yang,

Peng,

Sun

et al. 2023

J. Phys.: Conf. Ser.

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In this work, a SAW pressure sensor based on a simply supported beam was designed and fabricated. The SAW resonator deposited on 128° YX-lithium niobate (LNO) substrate was used as the sensing element. The LNO substrate was used as a simply supported beam, therefore strain transfer loss was avoided and uniaxial stress was directly applied to the SAW resonator. An indenter with two ledges was used to indent the LNO beam and then uniform strain was applied to the SAW resonator. The sensitivity was experimentally measured in a pressure range of 330 kPa. The results demonstrated that the sensitivity of the SAW pressure sensor in this work was as high as 2514 ppm/MPa. The high pressure sensitivity of the proposed SAW pressure sensor was analyzed. The device structure of the proposed SAW pressure sensor may help to design highly sensitive SAW pressure sensors.

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Section: Resultsmentioning

confidence: 59%

Section: Resultsmentioning

confidence: 99%

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Highly Sensitive SAW Pressure Sensor Based on Simply Supported Beam

Yang,

Peng,

Sun

et al. 2023

J. Phys.: Conf. Ser.

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“…The stability of the sound and durability are fundamental properties of the diaphragm. Therefore, the diaphragm must also have excellent dimensional stability, such as good moisture-proof and moisture-resistant strength, to ensure excellent acoustic characteristics . However, the wood itself is prone to hygroscopic deformation.…”

Section: Introductionmentioning

confidence: 99%

“…Therefore, the diaphragm must also have excellent dimensional stability, such as good moisture-proof and moisture-resistant strength, to ensure excellent acoustic characteristics. 8 However, the wood itself is prone to hygroscopic deformation. Even after delignification, the hydroxyl groups on the surface of the wood components are more exposed, and the hygroscopicity is further enhanced.…”

Section: Introductionmentioning

confidence: 99%

Ultra-Thin Wood-Based Acoustic Diaphragms Fabricated via an Environmentally Friendly Strategy

Yang

Dong

Meng

et al. 2022

ACS Appl. Mater. Interfaces

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An acoustic diaphragm is a crucial component that regulates sound quality in earphones and loudspeakers. Natural wood with inherent good acoustic resonance and vibration spectrum is widely used in sound devices. However, using natural wood to produce an acoustic diaphragm is still a big challenge because making ultra-thin wood is hard and it warps easily. Therefore, this study introduces a new method for preparing ultra-thin wood acoustic diaphragms less than 10 μm in thickness, relying on delignification, sulfonation, and densifying techniques. The innovative sulfonation process increased the intermolecular hydrogen bond force, which significantly improved the tensile strength and Young’s modulus of the wood diaphragm, up to 195 MPa and 27.1 GPa, respectively. Compared with the commonly used diaphragms in the market, this wood diaphragm exhibits an excellent specific dynamic elastic modulus up to 95.1 GPa/g cm3, indicating better acoustic properties. Also, the resonance frequency was up to 1240 Hz, 4.5 times higher than the titanium diaphragm among high-end products. Besides, the drying shrinkage rate of the ultra-thin wood diaphragm is only 1.2%, indicating excellent dimensional stability. This high-quality wood acoustic diaphragm has a very high application prospect and outstanding attributes for promoting the development of acoustic devices. Moreover, the reaction reagent can be recycled after preparation, and the selected reagents are green and environmentally friendly.

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Investigation on ferroelectric, dielectric and pressure sensing properties of samarium substituted lead magnesium niobate-lead titanate oxide

Singh

Kumar

2023

Physica B: Condensed Matter

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Highly sensitive thick diaphragm-based surface acoustic wave pressure sensor

Cited by 17 publications

References 27 publications

Highly Sensitive SAW Pressure Sensor Based on Simply Supported Beam

Highly Sensitive SAW Pressure Sensor Based on Simply Supported Beam

Ultra-Thin Wood-Based Acoustic Diaphragms Fabricated via an Environmentally Friendly Strategy

Investigation on ferroelectric, dielectric and pressure sensing properties of samarium substituted lead magnesium niobate-lead titanate oxide

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