Sensitivity Enhancement of SAW Pressure Sensor Based on the Crystalline Direction

Memon, Maria Muzamil; Pan, Shuliang; Wan, Jiang; Wang, Tao; Peng, Bin; Zhang, Wanli

doi:10.1109/jsen.2022.3165623

Cited by 13 publications

(5 citation statements)

References 30 publications

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“…The sensing mechanism of an L-SAW sensor with a delay line structure is based on the strain generated by mass loads. The strain alters the density, elastic constant, and other parameters of the device surface, leading to a change in the phase velocity of the acoustic wave [ 32 ]. Once the initial stress is determined, the SAW propagating in the piezoelectric dielectric can be described by the following equation:

…”

Section: Resultsmentioning

confidence: 99%

Finite Element Study for Mass Sensitivity of Love Surface Acoustic Wave Sensor with Si3N4-SiO2 Double-Covered Waveguiding Layer

Li,

Zhou,

Huang

et al. 2023

Micromachines

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Love surface acoustic wave (L-SAW) sensors are miniaturized, easy to integrate, and suitable for detection in liquid environments. In this paper, an L-SAW sensor with a thin Si3N4-SiO2 double-covered layer was proposed for samples with small mass loads. The output response, phase velocity of the acoustic wave, and the mass sensitivity were analyzed using the finite element method (FEM). The simulation results show that the Si3N4 layer with high wave velocity greatly weakens the limitation of SiO2 on the phase velocity. The phase velocity can reach about 4300 m/s, which can increase the frequency shift when the same mass load is applied. Within a certain range, the mass sensitivity of the sensor is enhanced with the increase in the total thickness of the waveguiding layer and the thickness ratio of Si3N4 in the double-covered layer. When the thickness ratio is 1:2, the peak value of the mass sensitivity of the sensor is approximately 50% higher than that achieved with only the SiO2 waveguiding layer. The surface average stress of the delay line region follows the same trend as the mass sensitivity. The increase in mass sensitivity is the result of the heightened stress on the sensor surface. This L-SAW sensor, featuring a double-covered waveguiding layer, demonstrates high sensitivity and a simple structure. The simulation results lay a foundation for the design and manufacture of SAW sensors.

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…”

Section: Resultsmentioning

confidence: 99%

Finite Element Study for Mass Sensitivity of Love Surface Acoustic Wave Sensor with Si3N4-SiO2 Double-Covered Waveguiding Layer

Li,

Zhou,

Huang

et al. 2023

Micromachines

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“…SAW pressure sensors have been extensively investigated across numerous applications. Traditionally, these sensors have employed materials such as AlN [22,23], quartz [24,25], Langasite [26], and LiNbO 3 [27]. Despite their lack of flexibility, these materials have found utility due to their exceptional stability in harsh environments [22,23,[26][27][28][29][30][31][32] and as resonators [25,27,[33][34][35][36][37].…”

Section: Surface Acoustic Wave Pressure Sensorsmentioning

confidence: 99%

“…Traditionally, these sensors have employed materials such as AlN [22,23], quartz [24,25], Langasite [26], and LiNbO 3 [27]. Despite their lack of flexibility, these materials have found utility due to their exceptional stability in harsh environments [22,23,[26][27][28][29][30][31][32] and as resonators [25,27,[33][34][35][36][37]. Various factors are considered in the design of SAW pressure sensors, including resistance to liquid exposure [37,38], resilience to residual stress [29,39], gas detection capabilities [30,31,40], and the impact of circumferential stresses including sensitivity to humidity [41,42].…”

Section: Surface Acoustic Wave Pressure Sensorsmentioning

confidence: 99%

Frequency shift of a PVDF surface acoustic wave sensor on a curved surface

Masoud,

Aslam,

et al. 2024

Smart Mater. Struct.

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Wearable sensors have generated a significant attention across various research domains, including the monitoring of human health, pressure sensing, and body health monitoring.Notably, substantial research has been focused on the utilization of piezoelectric sensors for precise pressure measurements in diverse applications, such as medical devices and structural health monitoring. This paper explains the external pressure measurement employing sensors crafted from Polyvinylidene Fluoride (PVDF), known for its remarkable ability to conform consistently to various surface shapes and curvatures. The primary objective of this study is to present an integrated experimental and numerical approach to quantifying the frequency shift of piezoelectric PVDF SAW sensors when deployed on curved surfaces, a crucial step in optimizing their performance for real-world applications. We aim to explain how changes in surface geometry impact frequency shifts concerning external pressure and movement. Our findings reveal a linear relationship between frequency shifts and geometric variations in a certain range, as supported by experimental data. Furthermore, it is observed that PVDF samples can be used to successfully measure the internal pressure of a canister. The consistency between experimental and numerical results underscores the validity and reliability of our approach. In summary, this paper contributes to our understanding of piezoelectric PVDF SAW sensor behavior when placed on curved surfaces. Our novel methodology combines experimental measurements and numerical simulations to quantify the impact of geometric changes on frequency shifts, providing valuable insights for future sensor applications.

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“…Among different types of acoustic wave devices, Surface acoustic wave (SAW) devices have captured wide attention owing to their simple detection mechanism, easy integration, high sensitivity, good stability, small size, low cost, high accuracy, planar structure, and capability to operate in wireless mode [19][20][21]. These features make the SAW devices appropriate for detecting various physical parameters such as pressure, temperature, gas, vapors, humidity, and motion [22][23][24][25][26]. The principle of humidity sensing is realized by covering the SAW device configured as a delay line or resonator with a sensing film, as shown in Figure 2.…”

Section: Resistivementioning

confidence: 99%

Surface Acoustic Wave Humidity Sensor: A Review

et al. 2023

Self Cite

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The Growing demands for humidity detection in commercial and industrial applications led to the rapid development of humidity sensors based on different techniques. Surface acoustic wave (SAW) technology is one of these methods that has been found to provide a powerful platform for humidity sensing owing to its intrinsic features, including small size, high sensitivity, and simple operational mechanism. Similar to other techniques, the principle of humidity sensing in SAW devices is also realized by an overlaid sensitive film, which serves as the core element whose interaction with water molecules is responsible for overall performance. Therefore, most researchers are focused on exploring different sensing materials to achieve optimum performance characteristics. This article reviews sensing materials used to develop SAW humidity sensors and their responses based on theoretical aspects and experimental outcomes. Herein the influence of overlaid sensing film on the performance parameters of the SAW device, such as quality factor, signal amplitude, insertion loss, etc., is also highlighted. Lastly, a recommendation to minimize the significant change in device characteristics is presented, which we believe will be a good step for the future development of SAW humidity sensors.

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Sensitivity Enhancement of SAW Pressure Sensor Based on the Crystalline Direction

Cited by 13 publications

References 30 publications

Finite Element Study for Mass Sensitivity of Love Surface Acoustic Wave Sensor with Si3N4-SiO2 Double-Covered Waveguiding Layer

Finite Element Study for Mass Sensitivity of Love Surface Acoustic Wave Sensor with Si3N4-SiO2 Double-Covered Waveguiding Layer

Frequency shift of a PVDF surface acoustic wave sensor on a curved surface

Surface Acoustic Wave Humidity Sensor: A Review

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